YSH20_mpl_je.pdf - 第60页
KJX-101 1 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1011
11
12
27
13
14
14
1
23
23
23
18
18
18
18
19
19
19
19
17
17
17
22
17
16
18
18
18
28
18
28
15
31
31
26
26
22
23
23
22
22
22
20
21
25
25
24
24
9
33
8
10
4
4
4
4
32
32
32
32
3
5
5
7
6
6
2
35
35
35
35
27
27
30
29
34
34
37
36
38
38
11
4
Door / Guide
Wafer LZ-axis
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M1350-00 COVER MAIN A ASSY. 1 /
Í
39
2
KJY-M1351-00
COVER,MAIN A
1
/
Í
40
3
KJY-M1352-00 PLATE,COVER A 1 /
41
4
KJY-M1354-00 HINGE 4 /
Í
42
5
KJY-M1355-00 PLATE 2 /
43
6
KJY-M1356-00 SEAL,TRIM 2 /
44
7
KJY-M1356-10 SEAL,TRIM 1 /
45
8
KJY-M1358-00 BRKT.,KEY 1 /
Í
46
9
KGX-M13A5-00 NUT PLATE 1 /
Í
47
10
KGS-M1360-00 BOLT 2 /
Í
48
11
KJY-M1360-00 COVER MAIN B ASSY. 1 /
Í
49
12
KJY-M1361-00 COVER,MAIN B 1 /
Í
50
13
KJY-M1352-00 PLATE,COVER A 1 /
51
14
KJY-M1355-00 PLATE 2 /
52
15
KJY-M1391-L0 BRKT.,ARM. 1 /
Í
53
16
KJY-M1391-R0 BRKT.,ARM. 1 /
Í
54
17
KHT-M1346-00 BUSH 4 /
Í
55
18
KHT-M1347-00 SPACER 8 /
Í
56
19
90990-28J045 WASHER,PLAIN 4
57
20
90990-31J006 BOLT,SHOULDER 1
58
21
KL3-M1348-10 GAS SPRING 1 A
Í
59
22
90990-41J136 COLLAR 5
60
23
90990-46J014 BOLT,THIN HEAD 5
61
24
92902-06600 WASHER PLAIN 4
62
25
KJY-M1393-00 ROLLER 2 /
Í
63
26
KV5-M1130-00 CATCH MG. 2 /
64
27
KJX-M715A-00 PULL 2 /
65
28
92902-06200 WASHER PLAIN 2
66
29
90K41-000470 LABEL,ALERT 1
67
30
90K41-001030 STICKER,CAUTION 2
68
31
98902-03004 SCREW BINDING HEAD 4
69
32
98902-04008 SCREW BINDING HEAD 24
70
33
91312-04008 BOLT HEX.SOCKET HEAD 2 M4X8
71
34
91312-05012 BOLT HEX.SOCKET HEAD 4 M5X12
72
35
95702-04500 NUT FLANGE 16
73
36
KJY-M1395-R0 COVER,SIDE RH. 1 /
Í
74
37
KJY-M1395-L0 COVER,SIDE LH. 1 /
Í
75
38
98702-03006 SCREW FLAT HEAD 12
76
11
4
Door / Guide
Wafer LZ-axis
KJX-1011
9
12
2
7
5
3
3
8
11
6
14
4
1
10
13
11
5
Stopper
Wafer LZ-axis