Gemini Semi Appendix Manual.pdf - 第122页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE 3.84 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 Month June Maintenance Procedure W ARNING BOARD CLAMPS. EXTREME CARE MUST BE EXERCISED WHEN WORK ING …

TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.83
SEMI Level Paste Dispenser (if fitted) Tick
Inspect wiring/connections and pneumatics.
Check the vanes do not foul the sensors.
Check the linear bearing guides for contamination.
Cycle the carriage, ensure smooth operation.
Check the carriage up and down sensors operate correctly.
Check the paste dispense movement on the linear bearing.
Check the critical home dimension.
SEMI 1
SEMI 2
Estimated time required for Monthly tasks 4.0 hours
Summary/Remarks
Signed: Date:

TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.84 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Month June Maintenance Procedure
WARNING
BOARD CLAMPS. EXTREME CARE MUST BE EXERCISED WHEN WORKING IN
THE TOOLING AREA OF THE MACHINE TO AVOID INJURY. THE FOILS ON THE
FRONT AND REAR BOARD CLAMPS ARE VERY SHARP.
WARNING
HARMFUL SUBSTANCES. CLEANING WIPES AND CLEANING SOLUTIONS MAY
CONTAIN SUBSTANCES HAZARDOUS TO HEALTH. OBSERVE ALL
MANUFACTURERS’ HEALTH AND SAFETY GUIDELINES. ALWAYS WEAR
APPROVED PROTECTIVE CLOTHING WHEN CLEANING THE MACHINE.
SPC Alignment
Check and Machine
Cycle Count
Fill out details: SPC Alignment Check and Machine Cycle Count at the start of
this section.
Software
Monthly Maintenance
SEMI Level Software Check Record Tick
Check the date and time settings.
Check the software loaded and options.
Check the software version is the latest issue.
SEMI 2
SEMI Level View Event Log Tick
Check for initialisation errors.
Check for screen position errors (31210, 31211, 31212).
Check for camera errors (31207, 31208).
SEMI 2
SEMI Level Under Screen Cleaner (USC) Tick
Check the condition of the squeegee blades (Blue).
NOTE
ASM recommend squeegee blades are replaced every six months.
Check the screen cleaner height.
Check the condition of all hoses and connections.
SEMI 1

TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.85
Monthly Hardware Check
Check that the paper feed mechanism operates correctly.
Check that the cleaner mechanism raises and lowers smoothly.
Check that the solvent dispenses and it is at a suitable pressure.
Check that solvent dispenses evenly across the paper or cassette.
Check the correct operation of the vacuum filtration unit.
Perform a USC cycle and confirm correct operation.
SEMI Level Under Screen Cleaner (USC) Tick
SEMI 2
SEMI Level Environmental Control Module (if fitted) Tick
Inspect the air filters clean/replace (as detailed in the equipment manual).
Check for leakage in the system.
Check the system holds the temperature (as described in the equipment manual).
SEMI 1
SEMI 2
SEMI Level General Maintenance Tick
Check the condition of the board clamps.
Clean the table top of paste and debris, apply a wipe of light oil.
Clean the round transport rails of paste and debris.
Inspect the air filters and clean/recommend replacement.
Cycle the board clamps ensure that clamping and release is smooth.
Cycle the Test 265test 1 board on the transport rails ensure smooth operation.
SEMI 1
SEMI 2
SEMI Level Screen Alignment Tick
Inspect the wiring and connections.
Inspect the three striker plates, clean and apply a wipe of light grease.
SEMI 1