Gemini Semi Appendix Manual.pdf - 第124页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE 3.86 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 Check all actuators home correctly . SEMI Level Screen Alignment Tick SEM I 2 SEMI Level USC V acuum …
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.85
Monthly Hardware Check
Check that the paper feed mechanism operates correctly.
Check that the cleaner mechanism raises and lowers smoothly.
Check that the solvent dispenses and it is at a suitable pressure.
Check that solvent dispenses evenly across the paper or cassette.
Check the correct operation of the vacuum filtration unit.
Perform a USC cycle and confirm correct operation.
SEMI Level Under Screen Cleaner (USC) Tick
SEMI 2
SEMI Level Environmental Control Module (if fitted) Tick
Inspect the air filters clean/replace (as detailed in the equipment manual).
Check for leakage in the system.
Check the system holds the temperature (as described in the equipment manual).
SEMI 1
SEMI 2
SEMI Level General Maintenance Tick
Check the condition of the board clamps.
Clean the table top of paste and debris, apply a wipe of light oil.
Clean the round transport rails of paste and debris.
Inspect the air filters and clean/recommend replacement.
Cycle the board clamps ensure that clamping and release is smooth.
Cycle the Test 265test 1 board on the transport rails ensure smooth operation.
SEMI 1
SEMI 2
SEMI Level Screen Alignment Tick
Inspect the wiring and connections.
Inspect the three striker plates, clean and apply a wipe of light grease.
SEMI 1
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.86 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Check all actuators home correctly.
SEMI Level Screen Alignment Tick
SEMI 2
SEMI Level USC Vacuum Filtration Unit (if fitted) Tick
If pre purchased, replace the paper, HEPA and carbon filters.
SEMI 1
SEMI Level USC Vacuum Filtration Unit (if fitted) Tick
Check the DC voltage levels are within tolerance as detailed in the DEK Power Monitor
program.
SEMI 2
SEMI Level Machine Level Tick
Ensure machine is level and all feet exert pressure on the floor.
SEMI 1
Estimated time required for Monthly tasks 4.0 hours
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.87
Summary/Remarks
Signed: Date: