Gemini Semi Appendix Manual.pdf - 第139页

TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.101 SEMI Level M37 Power Su pply En closure Tick Inspect wiring and connections. Clean area around air i…

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TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.100 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Monthly Hardware Check
Check that the paper feed mechanism operates correctly.
Check that the cleaner mechanism raises and lowers smoothly.
Check that the solvent dispenses and it is at a suitable pressure.
Check that solvent dispenses evenly across the paper or cassette.
Check the correct operation of the vacuum filtration unit.
Perform a USC cycle and confirm correct operation.
SEMI Level Under Screen Cleaner (USC) Tick
SEMI 2
SEMI Level Environmental Control Module (if fitted) Tick
Inspect the air filters clean/replace (as detailed in the equipment manual).
Check for leakage in the system.
Check the system holds the temperature (as described in the equipment manual).
SEMI 1
SEMI 2
SEMI Level General Maintenance Tick
Check the condition of the board clamps.
Clean the table top of paste and debris, apply a wipe of light oil.
Clean the round transport rails of paste and debris.
Inspect the air filters and clean/recommend replacement.
Cycle the board clamps ensure that clamping and release is smooth.
Cycle the Test 265test 1 board on the transport rails ensure smooth operation.
SEMI 1
SEMI 2
SEMI Level M36 Control Enclosure Tick
Inspect wiring and connections.
Ensure cards are seated properly.
Clean area around air inlets.
SEMI 1
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.101
SEMI Level M37 Power Supply Enclosure Tick
Inspect wiring and connections.
Clean area around air inlet.
SEMI 1
SEMI Level M39 Emergency Machine Off Enclosure Tick
Inspect wiring and connections.
SEMI 1
SEMI Level PC Enclosure Tick
Inspect wiring and connections.
SEMI 1
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.102 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Estimated time required for Monthly tasks 4.0 hours
Summary/Remarks
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