2.ANSI-ESD S20.20-2021中2.pdf - 第10页
ANSI/ESD S20.20 - 2021 iv 目录 1.0 总 则 ................................ ........................................................................................................... 1 2.0 适用范 围 ..............................…
ANSI/ESD S20.20-2021
iii
以下人员为 ANSI/ESD S20.20-2014、ANSI/ESD S20.20-2007 和/或 ANSI/ESD S20.20-1999 的编
制做出了重要贡献：
Brent Beamer
3M
Donald E. Cross
USN
Robert Cummings
NASA
Kevin Duncan
Seagate Technology
Reinhold Gaertner
Infineon Technologies
Steve Gerken
USAF
Ron Gibson
Advanced Static Control
Consulting
Tim Jarrett
Boston Scientific
Ronald L. Johnson
Intel
John T. Kinnear, Jr.
IBM
Anthony Klinowski
Boeing
Dave Leeson, Co-Chairman
Motorola SSTG
Garry McGuire
NASA
(Hernandez Engineering)
Thomas Mohler
Raytheon Systems
Corporation
Ralph Myers
ASC
Gene Monroe
NASA – LARC
Carl Newberg
MicroStat Laboratories
Dale Parkin
Seagate Technology
Robert Parr
Consultant
Brian Retzlaff
Plexus
Jeffrey Scanlon
ASC
Jeremy Smallwood
Electrostatic Solutions Ltd.
David E. Swenson
Affinity Static Control
Consulting, LLC
Sam Theabo
Plexus
Scott Ward
Texas Instruments
Joel Weidendorf
River's Edge Technical
Service
Craig Zander
Transforming Technologies
Sheryl Zayic
Boeing
下列个人对本文件的中文翻译做出了重要贡献：
戴清祥，苏州天华
Tay Chin Siang
Suzhou TA&A Ultra Clean
Tech
褚贝丽
Betty Chu
胡良盛，苏州科艺
Hu Liang Sheng
Suzhou CEP
林军，天马微电子
Lin Jun
Tianma Microelectronics
张夫春
Zhang Fu Chun
ANSI/ESD S20.20-2021
iv
目录
1.0
总则
........................................................................................................................................... 1
2.0
适用范围
.................................................................................................................................... 1
3.0
引用规范名录
............................................................................................................................. 1
4.0
术语和定义
................................................................................................................................. 2
5.0
人员安全
.................................................................................................................................... 2
6.0 ESD
管控体系
............................................................................................................................ 2
6.1
ESD 管控体系要求 ................................................................................................................ 2
6.2
ESD 管控体系总负责 ............................................................................................................ 2
6.3
适用性调整 ............................................................................................................................ 2
7.0 ESD
管控体系之行政管理要求
................................................................................................... 3
7.1
ESD 管控体系手册 ................................................................................................................ 3
7.2
人员培训计划 ........................................................................................................................ 3
7.3
防静电物品导入计划 ............................................................................................................. 3
7.4
防静电物品符合性验证计划 ................................................................................................... 4
8.0 ESD
管控体系之技术要求
.......................................................................................................... 4
8.1
接地/等电位连接系统 ............................................................................................................ 4
8.2
人员接地系统 ........................................................................................................................ 5
8.3
静电防护区（EPA） ............................................................................................................. 5
8.3.1
绝缘体
............................................................................................................................. 5
8.3.2
孤立导体
......................................................................................................................... 6
8.4
防静电包装 ............................................................................................................................ 9
8.4.1
美国国防部（
DoD
）军用包装要求
.................................................................................. 9
8.5
标识 ....................................................................................................................................... 9
ANSI/ESD S20.20-2021
v
附录
附录 A （资料性）: 其它制程方面的考虑 ....................................................................................... 10
附录 B （资料性）: ESD 敏感度测试 ............................................................................................. 11
附录 C （资料性）: 适用性调整 ..................................................................................................... 13
附录 D （资料性）: 参考文献 ........................................................................................................ 15
附录 E （资料性）: 方向声明 ......................................................................................................... 17
附录 F （资料性）: ANSI/ESD S20.20 的修订历史 ....................................................................... 18
附表
表 1. 接地 / 等电位连接系统之技术要求 ........................................................................................... 4
表 2. 人员接地系统之技术要求 ........................................................................................................ 5
表 3. EPA 内的防静电物品之技术要求 ............................................................................................. 7
表 4. 防静电包装要求 ....................................................................................................................... 9
表 5. 器件的 ESD 敏感度测试规范 ................................................................................................. 12