Program.x200.pdf - 第230页
(2) (2) (2) (2) (2) “ Camera #2 Low Mag Camera #2 Low Mag Camera #2 Low Mag Camera #2 Low Mag Camera #2 Low Mag ” Tab( Tab( Tab( Tab( Tab( 㺀▕⌐ 㺀▕⌐ 㺀▕⌐ 㺀▕⌐ 㺀▕⌐ ) ) ) ) ) • • • • • 乊䴷ᰓ⼏ 乊䴷ᰓ⼏ 乊䴷ᰓ⼏ 乊䴷ᰓ⼏ 乊䴷ᰓ⼏ पߐ “ CPK Of…
(1)(1)
(1)(1)
(1)“
Camera #1 High MagCamera #1 High Mag
Camera #1 High MagCamera #1 High Mag
Camera #1 High Mag”
Tab(Tab(
Tab(Tab(
Tab(
㺀▕⌐㺀▕⌐
㺀▕⌐㺀▕⌐
㺀▕⌐
))
))
)
••
••
•
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏
पߐ “CPK Offset(CPK ᅞ㺚)”Tab 乊䴷ⱙ[Camera #1 High Mag]
Tabͼᰓ⼏བྷϠ Tab 乊䴷Ȣ
Fig.3E24Fig.3E24
Fig.3E24Fig.3E24
Fig.3E24 “
Camera #1 High MagCamera #1 High Mag
Camera #1 High MagCamera #1 High Mag
Camera #1 High Mag”
TabTab
TabTab
Tab
乊䴷乊䴷
乊䴷乊䴷
乊䴷
••
••
•
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥
*1 Head*1 Head
*1 Head*1 Head
*1 Head
ᰓ⼏ᅞ㺚༉㓫ৌȢ
*2*2
*2*2
*2
X(0X(0
X(0X(0
X(0
ȋȋ
ȋȋ
ȋ
)[mm])[mm]
)[mm])[mm]
)[mm]
Y(0Y(0
Y(0Y(0
Y(0
ȋȋ
ȋȋ
ȋ
)[mm], X(90)[mm], X(90
)[mm], X(90)[mm], X(90
)[mm], X(90
ȋȋ
ȋȋ
ȋ
)[mm], Y(90)[mm], Y(90
)[mm], Y(90)[mm], Y(90
)[mm], Y(90
ȋȋ
ȋȋ
ȋ
)[mm],)[mm],
)[mm],)[mm],
)[mm],
X(180X(180
X(180X(180
X(180
ȋȋ
ȋȋ
ȋ
)[mm], Y(180)[mm], Y(180
)[mm], Y(180)[mm], Y(180
)[mm], Y(180
ȋȋ
ȋȋ
ȋ
)[mm], X(270)[mm], X(270
)[mm], X(270)[mm], X(270
)[mm], X(270
ȋȋ
ȋȋ
ȋ
)[mm],)[mm],
)[mm],)[mm],
)[mm],
Y(270Y(270
Y(270Y(270
Y(270
ȋȋ
ȋȋ
ȋ
)[mm])[mm]
)[mm])[mm]
)[mm]
ᅞ㺚ܘӋᯋͼ↤ᅞ㺚ᭅᣜᅯⱙ㾧ᑻ(0eȡ90eȡ180eȡ
270eರϿᮎ০) ͼ䛒䖰㸡 XY ⿐ࡽ䞤ⱙ㸺ℸȢ
(a)ᭅ䕨ܺ㣘 -0.15 mm +0.15 mmȢ
(b)ৡ XY 䕨ܺ Plus ᯋͼࡵㅬ Pattern Program ᭅ
ⱙ XY ᮎ০Ȣ
(c)↤Ͽᅞ㺚㾧ᑻⱙᅞ㺚㒨ᵱЂͼXY Ԣ㕃ߏ⦅ؤ⾐
⦅䈶ᯋͼ䇌ᇎᑩ䆺ᭅȢ
0107-001 5-24
3.23.2
3.23.2
3.2“
Device OffsetDevice Offset
Device OffsetDevice Offset
Device Offset”
TabTab
TabTab
Tab
Note
*1*1
*1*1
*1
*2*2
*2*2
*2
(2)(2)
(2)(2)
(2)“
Camera #2 Low MagCamera #2 Low Mag
Camera #2 Low MagCamera #2 Low Mag
Camera #2 Low Mag”
Tab(Tab(
Tab(Tab(
Tab(
㺀▕⌐㺀▕⌐
㺀▕⌐㺀▕⌐
㺀▕⌐
))
))
)
••
••
•
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏
पߐ “CPK Offset(CPK ᅞ㺚)”Tab 乊䴷ⱙ[Camera #2 Low Mag]
Tabͼᰓ⼏བྷϠ Tab 乊䴷Ȣ
Fig.3E25Fig.3E25
Fig.3E25Fig.3E25
Fig.3E25“
Camera #2 Low MagCamera #2 Low Mag
Camera #2 Low MagCamera #2 Low Mag
Camera #2 Low Mag”
TabTab
TabTab
Tab
乊䴷乊䴷
乊䴷乊䴷
乊䴷
••
••
•
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥
* *
* *
*
HeadHead
HeadHead
Head
ᰓ⼏ᅞ㺚༉㓫ৌȢ
*2*2
*2*2
*2
X(0X(0
X(0X(0
X(0
ȋȋ
ȋȋ
ȋ
)[mm])[mm]
)[mm])[mm]
)[mm]
Y(0Y(0
Y(0Y(0
Y(0
ȋȋ
ȋȋ
ȋ
)[mm],X(90)[mm],X(90
)[mm],X(90)[mm],X(90
)[mm],X(90
ȋȋ
ȋȋ
ȋ
)[mm],Y(90)[mm],Y(90
)[mm],Y(90)[mm],Y(90
)[mm],Y(90
ȋȋ
ȋȋ
ȋ
)[mm],)[mm],
)[mm],)[mm],
)[mm],
X(80X(80
X(80X(80
X(80
ȋȋ
ȋȋ
ȋ
)[mm],Y(80)[mm],Y( 80
)[mm],Y(80)[mm],Y( 80
)[mm],Y(80
ȋȋ
ȋȋ
ȋ
)[mm],X(270)[mm],X(270
)[mm],X(270)[mm],X(270
)[mm],X(270
ȋȋ
ȋȋ
ȋ
)[mm],)[mm],
)[mm],)[mm],
)[mm],
Y(270Y(270
Y(270Y(270
Y(270
ȋȋ
ȋȋ
ȋ
)[mm])[mm]
)[mm])[mm]
)[mm]
ᅞ㺚ܘӋᯋͼ↤ᅞ㺚ᭅᣜᅯⱙ㾧ᑻ(0eȡ90eȡ 80eȡ
270eರϿᮎ০) ͼ䛒䖰㸡 XY ⿐ࡽ䞤ⱙ㸺ℸȢ
(a)ᭅ䕨ܺ㣘 -0.5 mm +0.5 mmȢ
(b)ৡ XY 䕨ܺ Plus ᯋͼࡵㅬ Pattern Program ᭅ
ⱙ XY ᮎ০Ȣ
(c)↤Ͽᅞ㺚㾧ᑻⱙᅞ㺚㒨ᵱЂͼXY Ԣ㕃ߏ⦅ؤ⾐
⦅䈶ᯋͼ䇌ᇎᑩ䆺ᭅȢ
0107-001 5-25
3.23.2
3.23.2
3.2“
Device OffsetDevice Offset
Device OffsetDevice Offset
Device Offset”
TabTab
TabTab
Tab
Note
* *
* *
*
*2*2
*2*2
*2
(3)(3)
(3)(3)
(3)“
Master OffsetMaster Offset
Master OffsetMaster Offset
Master Offset”
TabTab
TabTab
Tab
••
••
•
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏乊䴷ᰓ⼏
乊䴷ᰓ⼏
पߐ “CPK Offset(CPK ᅞ㺚)”Tab 乊䴷ⱙ[Master Offset]Tabͼ
ᰓ⼏བྷϠ Tab 乊䴷Ȣ
Fig.3E26Fig.3E26
Fig.3E26Fig.3E26
Fig.3E26 “
Master OffsetMaster Offset
Master OffsetMaster Offset
Master Offset”
TabTab
TabTab
Tab
乊䴷乊䴷
乊䴷乊䴷
乊䴷
••
••
•
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥乊䴷ᵙ៥
乊䴷ᵙ៥
*1*1
*1*1
*1
Offset[ Offset[
Offset[ Offset[
Offset[
ȋȋ
ȋȋ
ȋ
]]
]]
]
ᰓ⼏ᅞ㺚ᭅᣜᅯⱙ㾧ᑻ( 0eȡ90eȡ180eȡ270e) Ȣ
*2*2
*2*2
*2
Theta[ Theta[
Theta[ Theta[
Theta[
ȋȋ
ȋȋ
ȋ
]]
]]
]
㸺ℸ XY ഥᷜ㋐ Camera ⱙ᪢Աഥᷜ㋐ⱙ㾧ᑻᏃⱙ Offset
ؑȢ
*3*3
*3*3
*3
High Mag XHigh Mag X
High Mag XHigh Mag X
High Mag X
[mm], High Mag Y[mm], Low Mag X[mm],[mm], High Mag Y[mm], Low Mag X[mm],
[mm], High Mag Y[mm], Low Mag X[mm],[mm], High Mag Y[mm], Low Mag X[mm],
[mm], High Mag Y[mm], Low Mag X[mm],
Low Mag Y[mm]Low Mag Y[mm]
Low Mag Y[mm]Low Mag Y[mm]
Low Mag Y[mm]
ᅞ㺚ܘӋᯋͼ↤ᅞ㺚ᭅᣜᅯⱙ㾧ᑻ(0eȡ90eȡ180eȡ
270eರϿᮎ০) ͼ䛒䖰㸡 XY ⿐ࡽ䞤ⱙ㸺ℸȢ
(a)ᭅ䕨ܺ㣘 -0.15 mm +0.15 mmȢ
(b)ৡ XY 䕨ܺ Plus ᯋͼࡵㅬ Pattern Program ᭅ
ⱙ XY ᮎ০Ȣ
(c)↤Ͽᅞ㺚㾧ᑻⱙᅞ㺚㒨ᵱЂͼXY Ԣ㕃ߏ⦅ؤ⾐
⦅䈶ᯋͼ䇌ᇎᑩ䆺ᭅȢ
0107-001 5-26
3.2Device Offset3.2Device Offset
3.2Device Offset3.2Device Offset
3.2Device Offset”
TabTab
TabTab
Tab
Note
*1*1
*1*1
*1
*2*2
*2*2
*2
*3*3
*3*3
*3
*4*4
*4*4
*4