Galaxy EX Safety Features.pdf - 第18页
SA FETY FEA TUR ES SEMI - LEVE L S OF ELECTR ICAL WORK 2.1 8 Tech ni cal R efere nce Ma nual C hapt er Issu e 6, Ju n 18
SAFETY FEATURES
LOCKOUT
2.16 Technical Reference Manual Chapter Issue 6, Jun 18
5. Dissipate remaining air in the pneumatic supply line.
6. Disconnect the pneumatic supply line from the machine.
7. This completes the pneumatic lockout.
SAFETY FEATURES
SEMI - LEVELS OF ELECTRICAL WORK
Chapter Issue 6, Jun 18 Technical Reference Manual 2.17
SEMI - LEVELS OF ELECTRICAL WORK
The table below show the four levels of energized electrical work carried out
on electrical equipment and its associated circuits, as defined by the SEMI S2-
0200 Standard.
Throughout all the ASM manuals when a maintenance or calibration
procedure falls within any of these four levels of energized electrical state, the
appropriate symbol is represented in the margin alongside that procedure.
A full definition can be found in the SEMI S2-0200 Safety Guidelines for
Semiconductor Manufacturing Equipment. See also NFPA 79-14.3, BS
EN60204, BS EN60950 and UL 1950.
Type
Symbol
Definition
1 Equipment is fully de-energized
2 Equipment is energized. Energized circuits are covered or
insulated. Work is performed at a remote location to pre-
clude accidental shock
3 Equipment is energized. Energized circuits are exposed
and accidental contact is possible. Potential exposures are
less than 30 volts rms, 42.4 volts peak to peak, 60 volts dc,
or 240 volt-amps in dry locations
4 Equipment is energized. Energized circuits are exposed
and accidental contact is possible. Potential exposures are
greater than 30 volts rms, 42.4 volts peak to peak, 60 volts
dc, 240 volt-amps in dry locations, or radio frequency (rf) is
present
SEMI 1
SEMI 2
SEMI 3
SEMI 4
SAFETY FEATURES
SEMI - LEVELS OF ELECTRICAL WORK
2.18 Technical Reference Manual Chapter Issue 6, Jun 18