N7202A029B.pdf - 第168页
29-A 搬送コンベア:SPG Transport Conv eyor:SPG パーツレイアウト Kit No. キット 品番 Kit Name キット名称 N610140085AA セクションNo. PARTS LAYOUT Section No. - - S139 ( KN610140085AA-05-1 )

Ref
No.
Remarks R
1
Q'ty
28
マスククリーニングユニット配線:SPG
Mask Cleaning Unit Wiring:SPG
イラスト
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610142537AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
CABLE-SUPPORT
4
1 N210142601AA
CABLE-VEYOR
1
2 N510064057AA 2700.05.075.0-14-2605.34PZ+261X7
HOSE
1
3 N510065683AA HTR-19
TUBE
1
4 KXF03PPAA00 TFU0425B-2
TUBE
1
5 KXF03PPAA00 TFU0425B-2
TUBE
1
6 KXF03PPAA00 TFU0425B-2
S138
--
( KN610142537AA-04 )

29-A
搬送コンベア:SPG
Transport Conveyor:SPG
パーツレイアウト
Kit No.
キット品番
Kit Name
キット名称
N610140085AA
セクションNo.
PARTS LAYOUT
Section No.
--
S139
( KN610140085AA-05-1 )

Ref
No.
Remarks R
1
Q'ty
29-A
搬送コンベア:SPG
Transport Conveyor:SPG
イラスト
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140085AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
PULLEY
8
1 N610127907AA
A
FRAME
1
2 N210170495AB
FRAME
1
3 N210170496AD
GUIDE
2
4 N210170497AA
PULLEY
2
5 N210092041AA
RING
2
6 N210088855AA
A
BRACKET
1
7 N210170502AA
BRACKET
1
8 N210170503AB
BRACKET
1
9 N210170504AD
PLATE
2
10 N210170505AB
COVER
1
11 N210180559AB
NUT-PLATE
1
12 N210181203AA
SENSOR(E3S-LS3N:650mm)
2
13 N610123451AA
SENSOR(E3T-SL22M:600mm)
1
14 N610153868AA
MOTOR
2
15 N510056674AA
S
A7677-9215K
BELT
2
16 N510063692AA TA-4UEB M/D 4.5WX927.0L
SPACER
2
17 N510019918AA CF-406E
CABLE-SUPPORT
14
18 N510048517AA FT4
BOLT
4
19 N510017308AA
Hexagon socket head cap screw M3X12-10.9 A2J (Trivalent)
BOLT
2
20 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J (Trivalent)
BOLT
2
21 N510017354AA
Hexagon socket head cap screw M4X20-10.9 A2J (Trivalent)
WASHER
8
22 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
WASHER
6
23 N510018494AA
Round finish plain washer 3 10H A2J (Trivalent)
WASHER
12
24 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
12
25 N510020099AA Thick washer M4
WASHER
6
26 N510018327AA Spring lock washer No.2 3 S A2J (Trivalent)
BOLT
2
27 N510017313AA
Hexagon socket head cap screw M3X16-10.9 A2J (Trivalent)
BOLT
2
28 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
24
29 N510017346AA
Hexagon socket head cap screw M4X12-10.9 A2J (Trivalent)
SCREW
2
30 N510018384AA
Hexagon socket set screw Cup point M5X8-45H A2J (Trivalent)
S140
--
( KN610140085AA-05-1 )