5OM-1604-002_w.pdf - 第77页
5OM-1604 1002-001 2-B
5OM-1604
1002-001 2-A
第二章
传感器及负载配置图
本章节记载了各部的传感器及负载配置图。
因含有一定的难度，参考时请充分注意。
5OM-1604
1002-001 2-B
5OM-1604
2-1
传感器及负载配置图
1002-001
架台下布局
S144
Y939
Y0938
Y939
Y0938
M66
Y0938
Y939
Y0938
Y939
Front View
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639 High-Speed/Multi-Functional Head Change-Over Y0939 High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection