5OM-1604-002_w.pdf - 第79页
5OM-1604 2-2 传感器及负载配置图 101 1-002 操作台布局 S101F S103F S102F H102F S105F Symbol Name Symbol Name S101F POWER ON PB (Front) S102F ST AR T (Front) H102F ST AR T (Front) LED S103F STOP (Front) S105F Emergency Stop Operation Swi…

5OM-1604
2-1
传感器及负载配置图
1002-001
架台下布局
S144
Y939
Y0938
Y939
Y0938
M66
Y0938
Y939
Y0938
Y939
Front View
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639 High-Speed/Multi-Functional Head Change-Over Y0939 High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection

5OM-1604
2-2
传感器及负载配置图
1011-002
操作台布局
S101F S103F
S102F
H102F S105F
Symbol Name Symbol Name
S101F POWER ON PB (Front)
S102F
START (Front)
H102F START (Front) LED
S103F STOP (Front)
S105F Emergency Stop Operation Switch (Front)

5OM-1604
2-3
传感器及负载配置图
1011-002
机盖布局
M102
S132 (Front Side)
S112F
S111F
H1
S132 (Rear Side)
M101
S112B
S105B
Symbol Name Symbol Name
H1 Light Tower
S112F
STAGE READY (Front) S112B STAGE READY (Rear)
S132 COVER LOCK (Front Side) S132 COVER LOCK (Rear Side)
M101 Ceiling Cooling Fan (Left) M102 Ceiling Cooling Fan (Right)
S111F READY (Front) [Feeder Ready] S105B Emergency Stop Operation Switch (Rear)