5OM-1604-002_w.pdf - 第99页
5OM-1604 2-22 传感器及负载配置图 1002-001
5OM-1604
2-21
传感器及负载配置图
多功能吸嘴储料器部布局
1002-001
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Upper Stage : Left View
Lower Srage : Right View
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 Multi Function Nozzle Stocker 2 Ascending 1 Y0936 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2 B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1 Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2 B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1 Shutter Close Check 1
B0622 Multi Function Nozzle Stocker 2 Clamp Check 1 B0922 Multi Function Nozzle Stocker 1 Clamp Check 1
5OM-1604
2-22
传感器及负载配置图
1002-001
5OM-1604
1002-001 3-A
第三章
元件配置图
本章节记载了各部的布局等。
因含有一定的难度，参考时请充分注意。