WaferTransportSolutionManual.pdf - 第60页
PRECIS ION WAFE R PALLET OVERVIEW 2.2 Wafer Transport Solution Chapter Issue 1 Aug 11 Sequence The precision wafer pallet has four porou s concentric vacuum rings. An external downline vacuum system, secu res the wa fer …
PRECISION WAFER PALLET
OVERVIEW
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.1
CHAPTER 2 PRECISION WAFER PALLET
OVERVIEW
The Wafer Transport Solution consists of a set of heavy pallet rails and a
precision wafer pallet loaded with the wafer to be printed. The system carries
the pallet and a wafer from the downline system into the print station.
Following a print operation, dependent upon system configuration, the wafer is
delivered to the downline conveyor and the pallet is returned to the inline
conveyor, ready to receive the next blank wafer.
The pallet handles 100mm, 150mm, 200mm and 300mm diameter wafers
(standard sizes), having thicknesses ranging from 75µm to 1mm. The pallet is
rigid enough to hold the wafer without the need for additional support tooling.
The transport belts are capable of handling pallets ranging from 1kg to 15kg.
Each wafer is held in place on the pallet by the downline equipment’s
integrated vacuum system. The external downline system automatically feeds
and receives wafers. To run this process, there is no requirement to manually
handle the pallets or wafers.
Figure 2-1 Heavy Pallet Rails and Precision Wafer Pallet
Item Description Item Description
1 Heavy Pallet Rails 2 Precision Wafer Pallet (wafer not
shown)
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PRECISION WAFER PALLET
OVERVIEW
2.2 Wafer Transport Solution Chapter Issue 1 Aug 11
Sequence The precision wafer pallet has four porous concentric vacuum rings. An
external downline vacuum system, secures the wafer and an aligning shim to
the pallet. Where small products are being processed, the shim masks off the
outer porous rings. To release the wafer from the pallet, a vacuum driven lift
mechanism is used; an external wafer handling system provides the means to
pick up the wafer and transfer it to the next in line machine tool.
1. The pallet and wafer enter the machine on the rail’s transport belts; the pallet
has overhanging edges which sit on the transport rails.
2. A non-contact board stop system positions the pallet beneath the screen.
3. Four beam lift cylinders, fitted to the transport beams, retract. The transport
belts drop depositing the pallet onto pallet support blocks.
4. The pallet snugger plate moves forward to hold the pallet in position.
5. Based on a fiducial scan performed by the camera, the machine aligns the
screen to the pallet.
6. The rising table lifts the rails, and pallet, to print height.
7. The print cycle commences.
8. Following the print operation, the rails and pallet lower with the rising table.
9. The pallet snugger rail moves back to release the pallet.
10. The beam lift cylinders extend to lift the pallet off the support blocks.
11. The transport belts carry the pallet and wafer back to the external downline-
system.
12. The holding vacuum switches off.
13. The vacuum release pin lift mechanism is actuated by the external handler
system. The three pins on the lift mechanism rise through the pallet,
releasing the wafer out of the shim.
14. The downline system removes the wafer and transports it to the next in line
tool.
15. The vacuum release pin lift mechanism retracts.
16. The pallet is moved back to the downline equipment and a new blank wafer
is delivered.
The sequence repeats until all wafers have printed.
PRECISION WAFER PALLET
MECHANICAL DETAIL
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.3
MECHANICAL DETAIL
Precision Wafer Pallet
Figure 2-2 Precision Wafer Pallet
Item Description Item Description
1 Wafer Pallet Aligning Shim 7 Shim Groove Connector (2 Positions)
2 Wafer Pallet 8 Porous Segment Vacuum Connectors
3 Porous Vacuum Segments 9 Vacuum Pin (3 Positions)
4 Positioning Block (2 Positions) 10 Vacuum Pin Lift Mechanism
5 Wafer Release Pin Holes 11 Ground/Earth Point
6 Shim Vacuum Groove 12 Pallet Overhang Edge (2 Positions)
A
View from Top of Precision Wafer Pallet
View on A
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