WaferTransportSolutionManual.pdf - 第86页
INSTALLATION EQUIPMENT INSTALLATION 3.10 Wafer Transport Solutio n Chapter Issue 1 Aug 11 Figure 3-5 CHAD Handler Overview W aferMate Layout FOUPs MMI T ransfer Station Aligner Four-axis Robotic Arm T ransfer Station
INSTALLATION
EQUIPMENT INSTALLATION
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.9
CHAD Handler Overview
WARNING
HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCISED WHEN
MANUALLY HANDLING HEAVY ITEMS INTO OR OUT OF THE MACHINE.
WARNING
MOVING PARTS. MOVING PARTS ARE PRESENT IN THE VICINITY OF THIS
WARNING LABEL, THESE PARTS HAVE THE POTENTIAL TO CAUSE INJURY.
There are two CHAD Handlers:
• WaferMate 300-2 handling wafers from 200mm to 300mm diameter.
• WaferMate 200-3 handling wafers from 125mm to 200mm diameter.
Sequence Both systems provide a pair of front loading FOUP’s (Wafer Stacks). They
each have a four axis robotic arm which, dependent upon configuration,
provide wafer handling to one or two DEK printers.
1. Wafers loaded in the FOUP's are picked out of the stack by the robotic arm.
2. The arm places the wafer into the aligner which spins to detect the wafer
slot or notch position.
3. Once aligned, the wafers are loaded into pallets where they are fed into the
flux printer.
4. After printing, the pallet is fed back into the transfer station, through the
handler’s centre section and out to the opposite side transfer station, for
transfer to the ball placement printer.
INSTALLATION
EQUIPMENT INSTALLATION
3.10 Wafer Transport Solution Chapter Issue 1 Aug 11
Figure 3-5 CHAD Handler Overview
WaferMate Layout
FOUPs
MMI
Transfer Station
Aligner
Four-axis Robotic Arm
Transfer Station
INSTALLATION
EQUIPMENT INSTALLATION
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.11
NUTEK Linking Conveyor Overview
WARNING
HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCISED WHEN
MANUALLY HANDLING HEAVY ITEMS INTO OR OUT OF THE MACHINE.
WARNING
MOVING PARTS. MOVING PARTS ARE PRESENT IN THE VICINITY OF THIS
WARNING LABEL, THESE PARTS HAVE THE POTENTIAL TO CAUSE INJURY.
Sequence The Nutek linking conveyor is a semi-automatic system. Pallets are manually
loaded into the module.
1. The operator opens the front cover to gain access to the module.
Rail Width Adjuster Rail Width AdjusterKey Switch
Mains Isolator
E Stop
Power
Lamp Vacuum Vacuum
Start Plate Reset ON OFF