WaferTransportSolutionManual.pdf - 第76页
PRECIS ION WAFE R PALLET REPLACEMENT PROCEDURES 2.18 Wafer Transport Solutio n Chapter Issue 1 Aug 11
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.17
Figure 2-9 300mm Wafer Pallet Vacuum Tubing
Shim Vacuum
Shim Vacuum
Lift Pin Vacuum
Switched Vacuum
Supply (Pin)
Switched Vacuum
Supply (Wafer)
Vacuum
Supply (Shim)
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.18 Wafer Transport Solution Chapter Issue 1 Aug 11
INSTALLATION
OVERVIEW
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.1
CHAPTER 3 INSTALLATION
OVERVIEW
This chapter describes the various steps needed to set up the printer and run
the product, it gives specific instruction for the Wafer Transport Solution (WTS)
module. The module consists of the precision wafer pallet and printer(s) fitted
with heavy pallet transport rails as detailed in Chapters 1 & 2 of this manual.
In addition, it describes the mechanical detail required to interface the printer
with an upline wafer transfer station. Currently, DEK recommends either the
CHAD Industries fully automatic system or the NUTEK semi-automatic
system.
Figure 3-1 DEK Printer and CHAD Transfer Station Configuration