WaferTransportSolutionManual.pdf - 第9页
HEAVY PALLET RAILS OVERVIEW Chapter Issue 1 August 11 Wafer Transport Solutio n 1.1 CHAPTER 1 HEA VY P ALLET RAILS OVER VIEW The W afer Tran sport Solution consists of a pair of heavy p allet rails and a precision wafer …
Wafer Transport Solution
HEAVY PALLET RAILS
OVERVIEW
Chapter Issue 1 August 11 Wafer Transport Solution 1.1
CHAPTER 1 HEAVY PALLET RAILS
OVERVIEW
The Wafer Transport Solution consists of a pair of heavy pallet rails and a
precision wafer pallet loaded with the wafer to be printed. The system carries
the pallet and wafer from the downline equipment into the print station. Follow-
ing a print operation, dependent upon system feed direction (left to left, right to
right, left to right or right to left), the wafer is delivered to the next-in-line tool and
the pallet is returned, ready to receive the next blank wafer.
The pallet handles 100mm, 150mm, 200mm and 300mm diameter wafers
(standard sizes), having thicknesses ranging from 75µm to 1mm. The pallet is
rigid enough to hold the wafer without the need for additional support tooling.
The transport belts are capable of handling pallets ranging from 1kg to 15kg.
The system can use either a semi-automatic load or fully automatic load method
for handling the pallets and wafers. Each wafer is held in place on the pallet by
the downline system’s integrated vacuum system. The external wafer handling
system automatically feeds and receives wafers. To run this process, there is
no requirement to manually handle the pallets or wafers.
Figure 1-1 Heavy Pallet Rails and Precision Wafer Pallet
Item Description Item Description
1 Heavy Pallet Rails 2 Precision Wafer Pallet (wafer not
shown)
2
1
HEAVY PALLET RAILS
OVERVIEW
1.2 Wafer Transport Solution Chapter Issue 1 August 11
Heavy Pallet Rails
Figure 1-2 Heavy Pallet Rails
Item Description Item Description
1 Ball Placement Sphere Dump Tray 7 Linear Rail Clamp (2 Positions)
2 Safety Stop (2 Positions) 8 Beam Lift Cylinder (4 Positions)
3 Linked Transport Belt Drive Shaft 9 Pallet Support Blocks (10 Positions)
4 Transport Drive Belt 10 Pallet Snugger Rail
5 Transport Beam 11 Transport Belt
6 Transport Drive Motor 12 Rail Width Collar (2 Positions)
View on Front of Heavy Pallet Rails
1
2
3
6
5
7
8
4
10
12
11
9