WaferTransportSolutionManual.pdf - 第8页
Wafer Transport Solutio n
Wafer Transport Solution
MANUAL ISSUE STATE
ISSUE 1 AUGUST 2011
Trademark Acknowledgment
In line with DEK Policy of continual improvement, this manual is periodically up-issued to reflect the
latest machine enhancements and provided with an issue state which is displayed at the bottom of
each hardcopy page.
Copyright Statement
Copyright 2011 DEK International, a business of DTG International GmbH. All Rights Reserved.
ProFlow , HawkEye
DEK International GmbH and/or DEK Printing Machines Limited.
, AutoFlex , Grid-Lok , PumpPrint , and VectorGuard are registered
trademarks of
DEK Printing Machines Limited.
Microsoft and MS-DOS are registered trademarks of Microsoft Inc.
Windows, Windows XP and Windows XP Embedded are trademarks of Microsoft Inc.
All other brand and product names are trademarks or registered trademarks of their
respective holders.
TM TM TM
DirEKt Ball Placement , Interactiv , PumpPrinting ,Sentinel and ProActiv are
trademarks of DEK International GmbH and/or
TM TM
DEK Worldwide
Contact us @ www.dek.com
Wafer Transport Solution
HEAVY PALLET RAILS
OVERVIEW
Chapter Issue 1 August 11 Wafer Transport Solution 1.1
CHAPTER 1 HEAVY PALLET RAILS
OVERVIEW
The Wafer Transport Solution consists of a pair of heavy pallet rails and a
precision wafer pallet loaded with the wafer to be printed. The system carries
the pallet and wafer from the downline equipment into the print station. Follow-
ing a print operation, dependent upon system feed direction (left to left, right to
right, left to right or right to left), the wafer is delivered to the next-in-line tool and
the pallet is returned, ready to receive the next blank wafer.
The pallet handles 100mm, 150mm, 200mm and 300mm diameter wafers
(standard sizes), having thicknesses ranging from 75µm to 1mm. The pallet is
rigid enough to hold the wafer without the need for additional support tooling.
The transport belts are capable of handling pallets ranging from 1kg to 15kg.
The system can use either a semi-automatic load or fully automatic load method
for handling the pallets and wafers. Each wafer is held in place on the pallet by
the downline system’s integrated vacuum system. The external wafer handling
system automatically feeds and receives wafers. To run this process, there is
no requirement to manually handle the pallets or wafers.
Figure 1-1 Heavy Pallet Rails and Precision Wafer Pallet
Item Description Item Description
1 Heavy Pallet Rails 2 Precision Wafer Pallet (wafer not
shown)
2
1