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PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 85 Revision 57, February, 2023 Probe Station A ccessories Compa tibil ity • SUMMIT200, C M300xi, Elite 3 00 141 -7 79 — m mW Larg e Ar ea P osi ti …
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 84
Revision 57, February, 2023 Probe Station Accessories
mmW and Motorized Positioners
OPEN PLATFORM R F AND MICROWAVE POSITIONERS
129227 — PH350HF (2)
Features
• Set of two PH350HF inc ludes
probe arms for fixing standard
HF probes from all vendors
• For adaptation of the 1 mm
110GHz modules Keysight
N5250A or Anritsu 3742A-EW
fixed with scr ew s on the PH35 0
• For adaptation of all Rohde & Schwarz converter with 1 mm cable,
requires additional adapter platen depending from type (on request)
• Spe cial flat design to minimize the HF cable length for highest
measurement dynamic range
• Mounting of other tuners is possible with leveling feet and/or
adapter platen (on request)
• Fixed by screws onto the HF platen
Specifications
• Travel range:
– X/Y: 25 mm (1 in)
– Z: 10 mm (0.4 in) (z-axis control: cw=down, ccw=up)
• With 75 mm (3 in) fast X-coarse movement f or coaxial
measurements
• Micrometer pitch: 500µm pitch (50 TPI)
Compatibility
• All PA/PM stations with dedicated platen (except BlueRay and
MicroAlign)
138230 — PH510 Motorized Positioner
Features
• IV/CV, RF motorized probing
• Multi-contact/mixed signal probing
• Versatile wafer level reliability
probing
Specifications
• Feature resolution: 3 μm ( 0.12
mils)
• Travel range: 25 mm (1 in) in X, Y, and Z
• Encoder resolution: (X / Y / Z) 0.02/ 0.02/ 0.02 μm (0.0008 mils)
• Mount: vacuum, magnetic, bolt down
• Footprint: 64 x 122 mm (2.5 x 4.8 in)
Configuration
• Use adapter 138610, 142480 or 143098 for mounting to PM5,
PM8, PM300, PA200, PA300, PA200 BlueRay, PA300 MicroAlign
Compatibility
• PM5, PM8, PM300, PM300PS, PA200, PA200 BlueRay, PA300,
PA300 MicroAlign
CM300XI & ELITE 300 RF AND MICROWAVE
POSITIONERS
141-778 — mmW Large Area Positioner (E)
Features
• Used for high-performance
single-ended/differential
broadband/ mm-Wave, sub-THz
S-parameters, and s ource/load-
pull, RF noise probing
• Used with Infinity / ACP / T-Wave
high performance RF probes
• Precision 3 axis l arge area
positioner for mmWave probes
• Optimized for CM300xi and Elite
300 Station Platforms
• Micrometer set planarity
adjustment
Specifications
• Feature resolution: 3 μm (0.12
mils)
• Travel range:
– X/Y: 15 0 mm (5.9 in)
– Z: 12.5 mm (0.5 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjust: ±5°
• 2-port probe tip separation
• Adjustable for MicroChamber TopHat: 40 mm (1.6 in for Elite) and
43 mm (1.7 in for CM300xi)
• Without MicroChamber TopHat: TBD mm (y in)
• Mount: bolt-down
• Footprint: 204 x 204 mm (8 in)
• Weight = approx. 11 kg (23 pounds)
Configurations
• Use on platen right location as East pos itio ner (2-port)
4-port configuration using
East mmWave positioner,
West mmWave positioner,
and 2 E/W RF positioners
placed in N/S positions
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 85
Revision 57, February, 2023 Probe Station Accessories
Compatibility
• SUMMIT200, CM300xi, Elite 300
141-779 — mmW Large Area Positioner (W)
Features
• Use d for high-performance single-
ended/differential broadband/ mm-
Wave, sub-THz S-parameters, and
source/load-pull, RF noise probing
• Use d with Infinity / ACP / T-Wave
high performance RF probes
• 3 axis large area positioner for mmWave probes
• Optimized for CM300xi and Elite 300 Station Platforms
• Micrometer set planarity ad justment
• Industry standard RF probe mount
Specifications
• Feature resolution: 3 μm ( 0.12 mils)
• Travel range:
– X/Y: 150 mm (5.9 in)
– Z: 12.5 mm (0.5 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity ad just: ±5°
• 2-port probe tip separation
• Adjustable for MicroChamber TopHat: 40 mm (1.6 in for Elite) and
43 mm (1.7 in for CM300xi)
• Without MicroChamber TopHat: TBD mm (y in)
• Mount: bolt-down
• Footprint: 204 x 204 mm (8 in)
• Weight = approx. 11 kg (23 pounds)
Configurations
• Use on platen left loc ation as West positioner (2-port)
Compatibility
• SUMMIT200, CM300xi, Elite 300
181-895 — mmW Large Area Positioner HTS (E)
Features
• Used for high-performance
single-ended/differential
broadband/ mm-Wave, sub-THz
S-parameters, and s ource/load-
pull, RF noise probing
• Used with Infinity / ACP / T-Wave
high performance RF probes
• Precision 3 axis l arge area
positioner for mmWave probes
• Optimized for CM300xi and Elite
300 Station Platforms
• Micrometer set planarity
adjustment
• High temperature stability (HTS)
• Recommended for testing at high
temperatures or multiple
temperatures
Specifications
• Feature resolution: 3 μm (0.12 mils)
• Travel range:
– X/Y: 15 0 mm (5.9 in)
– Z: 12.5 mm (0.5 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjust: ±5°
• 2-port probe tip separation
• Adjustable for MicroChamber TopHat: 40 mm (1.6 in for Elite) and
43 mm (1.7 in for CM300xi)
• Without MicroChamber TopHat: TBD mm (y in)
• Mount: bolt-down
• Footprint: 204 x 204 mm (8 in)
• Weight = approx. 11 kg (23 pounds)
Configurations
• Use on platen right location as East pos itio ner (2-port)
Compatibility
• CM300xi with Top Hat, Elite 300
181-896 — mmW Large Area Positioner HTS (W)
Features
• Used for high-performance single-
ended/differential broadband/ mm-
Wave, sub-THz S-parameters, and
source/load-pull, RF noise probing
• Used with Infinity / ACP / T-Wave
high performance RF probes
• Precision 3 axis l arge area positioner for mmWave probes
4-port configuration using
East mmWave positioner,
West mmWave positioner,
and 2 E/W RF positioners
placed in N/S positions
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 86
Revision 57, February, 2023 Probe Station Accessories
• Optimized for CM300xi and Elite 300 Station Platforms
• Micrometer set planarity ad justment
• High temperature stability (HTS)
• Rec ommended for testing at high temperatures or multiple
temperatures
Specifications
• Feature resolution: 3 μm ( 0.12 mils)
• Travel range:
– X/Y: 150 mm (5.9 in)
– Z: 12.5 mm (0.5 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity ad just: ±5°
• 2-port probe tip separation
• Adjustable for MicroChamber TopHat: 40 mm (1.6 in for Elite) and
43 mm (1.7 in for CM300xi)
• Without MicroChamber TopHat: TBD mm (y in)
• Mount: bolt-down
• Footprint: 204 x 204 mm (8 in)
• Weight = approx. 11 kg (23 pounds)
Configurations
• Use on platen left loc ation as West positioner (2-port)
Compatibility
• CM300xi with TopHat, Elite 300
SUMMIT 11000/12000 RF AND MICROWAVE
POSITIONERS
133-525 — mmW Positioner, Manual, West Positioner
Features
• Precision 3 axis large area
positioner for Waveguide and
1.0 mm coaxial probes
• True vertical Z-axis avoids
probe damage when probes
are in close proximity to each other (thru measurements) and ea sy
to view initial contact for accurate pr obe placement
• Quick release mechanism on X and Y axes for rapid test set-up
• Micrometer set planarity ad justment
• Industry standard RF probe mount
• Includes brackets to secure common test heads
Specifications
• X travel: 132 mm (5.2 in)
• Y travel: 143 mm (5.6 in)
• Z travel: 12.5 mm (0.5 in) (z-axis control: c w=down, ccw=up)
• Micrometer set planarity ad just: ±5°
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Configurations
• Use on platen right location as West positioner
Compatibility
• Summit 11000/12000, S300
133-528 — mmW Positioner, Manual, East Position
Features
• Precision 3 axis l arge area
positioner for Waveguide and
1.0 mm coaxial probes
• True vertical Z-axis avoids
probe damage when probes
are in close proximity to each other (thru measurements) and easy
to view initial co ntact for accurate probe placement
• Quick release mechanism on X and Y axes for rapid test set-up
• Micrometer set planarity adjustment
• Industry standard RF probe mount
• Includes brackets to secure common test heads
Specifications
• X travel: 132 mm (5.2 in)
• Y travel: 143 mm (5.6 in)
• Z travel: 12.5 mm (0.5 in) (z-axis control: cw=down, c cw=up)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Configurations
• Use on platen left location as East positioner
Compatibility
• Summit 11000/12000, S300