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PN 141-400 www.formfactor.com PA200 • 63 Revision 57, February, 2023 Probe Station A ccessories 135 08 0 — A d apt atio n Int egr atin g Sphe r e 4 in Manu al Feat ur es • I ntegrating sphere holder for P A200 Bl ueRay D…

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PN 141-400 www.formfactor.com PA200 • 62
Revision 57, February, 2023 Probe Station Accessories
143820 — Chuck, 200 mm, HF, PA200A
Features
• Chuck insulated from
machine
• Vacuum fixture for two
calibration substrates or
probe cleaning pads
• Vacuum zones for 50 mm
(2 in), 100 mm (4 in), 150
mm (6 in), and 200 mm (8 in) wafers
• Single d ie vacuum location
• Material: stainless steel (others available on request)
• Flat surface with vacuum holes (0.8 mm [0.03 in] Ø)
Compatibility
• PA200A BlueRay
143821 — Chuck, 200 mm, HF, AP200
Features
• Chuck insulated from machine
• Vacuum fixture for two
calibration substrates or probe
cleaning pa ds
• Vacuum zones for 50 mm (2
in), 100 mm (4 in), 15 0 mm (6
in), and 200 mm (8 in) wafers
• Single d ie vacuum location
• Material: stainless steel (others available on request)
• Flat surface with vacuum holes (0.8 mm [0.03 in] Ø)
Compatibility
• AP20 0 BlueRay
MISCELLANEOUS ACCESSORIES
133371 — Operation Lamp 3 Colors
Features
• Colors: red, yellow, green
• Programmable through probe station control
software
• Red light can be programmed static or blinking
• 800 mm (31.5 in) pole (when combined with the
instrument measurement shelf [136687], the
mounting pole is reduced to 400 mm [15.7 in])
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
133667 — Mount Arm for M onitor, Keybo ard, Mouse,
and Joystick
Features
• Mount arm for flat panel monitor,
mouse and joystick or Expert
Control Panel
• Includes compact computer
keyboard (US English)
• High quality pneumatic springs
and two revolving joints
• Swing, tilt and r otate for optimum
ergonomic positioning
• Dynamically adjustable to any
working height
• Requires a mach ine table 700 or VIT701/800/801 for mounting
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
PN 141-400 www.formfactor.com PA200 • 63
Revision 57, February, 2023 Probe Station Accessories
135080 — Ad aptation Integrating Sphere 4 in Manual
Features
• Integrating sphere holder for
PA200 BlueRay DS
• Manual sphere adjustment
• Mount for integrating sphere 10 2
mm (4 in) LabSphere (sphere not
part of this item)
• Other spheres can be adapted on request
• Cannot be combined with automatic loader
Specifications
• Move men t Range X/Y: 2 5 mm ( 1 in)
• Move men t Range Z: 10 mm (0.4 in)
Compatibility
• PA200 Bl ueRay
136687 — Measuring Instrument Shelf for BlueRay
Features
• Two planes for measurement
equipment
Specifications
• Dimensions (W x D): 350 x 380 mm
(13.8 x 15 in) each
• Max. load : 30 k g (66 lb)
Compatibility
• PA200 Bl ueRay, PA200 DS BlueRay
• Cannot be combined with shield enclosures
138390 — SE1000 to VIT700/701 Adapter
Features
• Connects the SE1000 to the
700 series pro be station tables
• By using the VIT701, vibrations
of the ShieldEnclosure are
isolated from the probe station
Compatibility
• PA200 Bl ueRay, PA200 DS
BlueRay
• Not compatible with BlueRay loader module
138651 — Pneumatic Switch Terminal
Features
• Terminal is moun ted to BlueRay platen
• Used for switching cal-site vacuum supply
Compatibility
• PA200 BlueRay (not compatible with the
BlueRay DS)
139985 — Adaptation Integrating Sphere 4 in Motorized
Features
• Integrating sphere holder for PA200
BlueRay DS
• Motorized/programmable sphere
adjustment
• Mount for integrating sphere 102 mm
(4 in) LabSphere (sphere not part of
this item)
• Other spheres can be adapted on request
• Can be combined with automatic loader
Specifications
• Movement range X/Y: 25 mm (1 in)
• Movement range Z: 25 mm (1 in)
Compatibility
• PA200 BlueRay
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 64
Revision 57, February, 2023 Probe Station Accessories
Positioners and Positioner Accessories
DC Positioners
ENTRY LEVEL
DPP105-M/V-AI-S
Features
• Use d for basic IV probing
• Ideal for applications that require
more than eight positioners
• Use d with PTT DC probe n eedles
• Low cos t probing
• Extremely small footprint
• Probe-tip pressure adjustment
• Single a rm with gold-plated clamping included
• Suitable for probing pads down to 100 x 100 µm (3.9 x 3.9 mils)
Specifications
• Travel range:
– X: 8 mm (0.3 in)
– Y: 6 mm (0.2 in)
– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)
• Feature resolution:5 µm (0.2 mil s)
• Screw resolution:
– X: 3 50 µm (13.8 mils)/rev (70 TPI)
– Y: 500 µm (19.7 mils)/rev (50 TPI)
– Z: 70 µ m (2.8 mils)/rev (350 TPI)
• Base: magnetic or vacuum
• Footprint: 60 x 20 mm (2.4 x 0.8 in)
• The temperature of the cable containing arm must not exceed
200°C. Usually, this is suitable for a 30 0°C wafer temperature in an
open setup with an arm at least 10 mm above the wafer.
Compatibility
Ordering Information
DPP105-M/V-PTH
Features
• Used for basic IV probing
• Ideal for applications that require
more than eight positioners
• Used with PTT DC probe needles
• Low cost probing
• Extremely small f ootprint
• Probe-tip pressure adjustment
• Compatible with PTT needle holders
• Suitable for probing pa ds down to 100 x 100 µm (3.9 x 3.9 mils)
Specifications
• Travel range:
– X: 8 mm (0.3 in)
– Y: 6 mm (0.2 in)
– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)
• Feature resolution:5 µm (0.2 mils)
• Screw resolution:
– X: 3 50 µm (13.8 mils)/rev (70 TPI)
– Y: 500 µm (19.7 mils)/rev (50 TPI)
– Z: 70 µm (2.8 mils)/rev (350 TPI)
• Base: magnetic or vacuum
• Footprint: 60 x 20 mm (2.4 x 0.8 in)
Compatibility
Ordering Information
• DPP105-M-PTH
• DPP105-V-PTH
NOTE
Positioner movement ranges specified here may be further limited by specific application setups.
i
Open Platform Bundles
PM5
PM8
PM300
PA200
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP105-M-AI-S 133346
DPP105-V-AI-S 100298
Open Platform +
PTH Arms
Summit 11000/12000