141-400-57-probestationaccessoriescatalog.pdf_-_141-400-probestationaccessoriescatalog_1.pdf.pdf - 第6页
PN 141-400 www.formfactor.com Contents • v Revision 57, February, 2023 Probe Station Acc essories 181-134 — eVue I V Digital Imaging System, 40X, Remote Focus, for C M300 (no focus block, for motorized transport) .......…

PN 141-400 www.formfactor.com Contents • iv
Revision 57, February, 2023 Probe Station Acc essories
Shield Enclosures/Dark Boxes................................................................................................................... 29
111650 — Shield Enclosure, SE1200 EMC..................................................................................................... 29
138121 — Shield Enclosure, SE1000 EMC wit h Interlock and Illumination .................................................. 29
100689 — EMC Light-Tight Feedthrough ..................................................................................................... 29
112391 — EMC Test Equipment Interface, Kelvin ....................................................................................... 29
112392 — EMC Test Equipment Interface, Standard ................................................................................... 29
EPS-ACC-SE750-COAX — Shield Enclosure.................................................................................................... 30
EPS-ACC-SE750-TRX — Shield Enclosure....................................................................................................... 30
112392 — EMC Test Equipment Interface, Standard ................................................................................... 30
Mounting Accessories............................................................................................................................... 31
138600 — Single Moni tor Arm...................................................................................................................... 31
148858 — Dual Monitor Arm........................................................................................................................ 31
138846 — Control Console ........................................................................................................................... 31
177-395 — LCD, Keyboard, Joystick and Mouse M ounting Kit for Vibration Isolation Table ....................... 31
Miscellaneous Accessories........................................................................................................................ 32
100422 — Textool Socket Adapter ............................................................................................................... 32
100539 — Vacuum Switches for HF Chuck ................................................................................................... 32
100605 — Inker, DPP2xx/DPP3xx ................................................................................................................. 32
145530 — Inker Cartridge, Markem 6990 .................................................................................................... 32
157-842 — Universal DUT Board Holder....................................................................................................... 32
161-096 — Analogue Separation Drive Display for MPS150 Universal P laten ............................................. 32
164-486 — Analogue Separation Drive Display for MPS150 MMWPlaten ................................................... 32
164-917— Air Drying Unit ............................................................................................................................. 33
183-000 — Portable Vacuum System ........................................................................................................... 33
183-838 — Vacuum Pump Kit Including Vacuum Buffer Re servoir .............................................................. 33
192-085 — Air Drying Unit ........................................................................................................................... 33
M150-ACC-13 — Vacuum Manifold, Magnetic Base..................................................................................... 34
M150-ACC-16 — Magnetic Cable Clamp Kit ................................................................................................. 34
M150-ACC-18 — Pin to Banana Interface Kit................................................................................................ 34
M150-ACC-19 — Triax Panel, Magnetic Base................................................................................................ 34
M150-ACC-28 — Coax Panel, Magnetic Base................................................................................................ 34
Manual Stations................................................................................................................................................ 36
PM8 ............................................................................................................................................................... 36
100507 — Supply Kit for Vacuum Adapter ................................................................................................... 36
190-243 — ATT Auxiliary Chuck 160/200 mm for ISS up to 22.2mm............................................................ 36
PM300 ........................................................................................................................................................... 36
133270 — Additional Chuck for Two Substrates........................................................................................... 36
190-244 — ATT Auxiliary Chuck 300 mm dual for ISS up to 22.2mm ........................................................... 36
Microscopes ..................................................................................................................................................... 37
eVue IV..................................................................................................................................................... 37
181-123 — eVue IV Digital Imaging System, 10X, Remote Focus, Pro Package, for CM300 (no focus block, for
motorized transport)..... ................................................................................................................................ 37
181-124 — eVue IV Digital Imaging System, 10X, Remote Focus, for CM300 (no focus block, for motorized
transport) ................................................ ...................................................................................................... 37
181-133 — eVue IV Digital Imaging System, 40X, Remote Focus, Pro Package, for CM300 (no focus block, for
motorized transport)..... ................................................................................................................................ 38

PN 141-400 www.formfactor.com Contents • v
Revision 57, February, 2023 Probe Station Acc essories
181-134 — eVue IV Digital Imaging System, 40X, Remote Focus, for CM300 (no focus block, for motorized
transport) ................................................ ...................................................................................................... 38
181-121 — eVue IV Digital Imaging System, 10X, Remote Focus, for Elite 300 (no focus bl ock) ................. 39
181-131 — eVue IV Digital Imaging System, 40X, Remote Focus, for Elite 300 (no focus bl ock) ................. 39
181-122 — eVue IV Digital Imaging System, 10X, Remote Focus, Pro Package, for Elite 300 (no focus block) .
40
181-132 - eVue IV Digital Imaging System, 40X, Remote Focus, Pro Package, for Elite 300 (no focus block) ...
40
181-125 — eVue IV Digital Imaging System, 10X, Remote Focus ................... .............................................. 41
181-135 — eVue IV Digital Imaging System, 40X, Remote Focus ................... .............................................. 41
181-126 — eVue IV Digital Imaging System, 10X, Remote Focus, Pro Package............................................ 42
181-136 — eVue IV Digital Imaging System, 40X, Remote Focus, Pro Package............................................ 42
181-127 — eVue IV Digital Imaging System, 10X, R-focus for manual stations (Velox, Ctrl, LCD), Standalone.
43
181-128 — eVue IV Digital Imaging System, 10X, R-focus, Pro package for m anual stations (Velox, Ctrl, LCD)
43
181-137 — eVue IV Digital Imaging System, 40X, R-focus for manual stations (Velox, Ctrl, LCD) ................ 44
181-138 — eVue IV Digital Imaging System, 40X, R-focus, Pro package for m anual stations (Velox, Ctrl, LCD)
44
eVue Pro Package Upgrade Kit.................................................................................................................. 46
131-964 — Pro Package Upgrade Kit for eVue generation I, II and III .......................................................... 46
183-923 — Pro Package Upgrade Kit for eVue IV ......................................................................................... 46
SlimVue.................................................................................................................................................... 47
157-459 — SlimVue Microscope................................................................................................................... 47
Seiwa 888 ............................................. .................................................................................................... 47
VMSS-888L — Seiwa Microscope for IR Lasers with Manual Foc us and Accessory Ki t................................. 47
VMSS-888 — Seiwa Microscope with Manual Focus and Accessory Kit ....................................................... 48
Mitutoyo FS70 .......................................................................................................................................... 49
VMSS-70L — Mitutoyo Finescope FS-70 for IR Lase rs, Obj., 10X Eyepcs, Fiber Optic Illuminator................ 49
VMSS-70Z — Mitutoyo Finescope FS-70, Objectives, 10X Eyepcs, Fiber Optic Illuminator.......................... 49
Motic PSM1000 ........................................................................................................................................ 50
141763 — Motic PSM-1000 Microscope ...................................................................................................... 50
SMZ-171 ................................................................................................................................................... 51
780-00602 — Motic St ereozoom Microscope, SMZ-171 .............................................................................. 51
775-00865 — 1.5x Objective for Motic SMZ -171-TH .................................................................................... 51
Leica......................................................................................................................................................... 52
132-770 — Leica S8 APO StereoZm Microscope Kit, Wide FOV, MTS Stations, Video Ready....................... 52
131-780 — Leica S8 Stereo Zoom Microscope Kit, 1.0 - 8.0 X Zoom, Video-Ready ...................................... 52
Objectives/Eye Pieces............................................................................................................................... 53
Mitutoyo Objectives ...................................................................................................................................... 53
Optem Objec tives .. .... .................................................................................................................................... 54
Seiwa Objectives............................................................................................................................................ 54
Leica Objectives ............................................................................................................................................. 55
131-788 — Leica 25 X Eye P ieces, High Performance, Extended Reli ef for Leica Microscopes .................... 55

PN 141-400 www.formfactor.com Contents • vi
Revision 57, February, 2023 Probe Station Acc essories
131-789 — 30x Eyepieces for Leica S6/S8 M icroscopes ............................................................................... 55
132-109 — Leica 0.63 Auxiliary Lens for S8 Leica Microscope...................................................................... 55
Microscope Adapters, Mounting Plates, and Accessories...... .................................................................... 56
Adapters ........................................................................................................................................................ 56
111486 — Microscope Adapter, A-Zoom and Motic PSM-1000/229 ........................................................... 56
120103 — Microscope Adapter, Optem/229................................................................................................ 56
120586 — Microscope Adapter, Mitutoyo FS70x-S/229 ......................................................................... ..... 56
132712 — Microscope Adapter, Optem ....................................................................................................... 56
133915 — Microscope Adapter, Olympus SZ2-STP/229............................................................................... 56
142730 — Microscope Adapter, Motic SMZ-168/171/229 .......................................................................... 56
Mounting Plates............................................................................................................................................. 56
158-064 — Microscope Mount ing Kit, Leica, Manual Transport .................................................................. 56
Accessories .................................................................................................................................................... 57
102-363 — Mitutoyo Video Adapter, 1.0X Magnification ............................................................................ 57
Cameras and Video Packages................ .................................................................................................... 58
67120 — Moticam 2300 CMOS Camera ....................................................................................................... 58
155-499 — 3M Pixel 1/2 in CMOS Camera C Mount USB ........................................................................ ..... 58
169-080 — Velox Digital Camera Kit ............................................................................................................. 58
780-01191 — Moticam 4000 Sales Package, 8M, 1/1.8 in, USB/HDMI/SD, 32GB SD-card, USB Mouse ...... 58
190-956 — Velox Digital Camera Kit USB3 5 MP ........................................................................................... 58
780-00536 — Velox for Manual Stations Kit, Velox, USB Camera ................................................................ 59
782-00119 — Velox Digital Camera Kit USB3 w /o light 5MP ........................................................................ 59
EPS-ACC-HDTV+ — Digital TV Package.......................................................................................................... 59
Optical .............................................................................................................................................................. 60
Integrating Sphere and Mounts ................................................................................................................ 60
53541 — Integrating Sphere, Zenith ............................................................................................................. 60
134826 — Integrating Sphere Mount, Mitutoyo FS7 0.................................................................................. 60
139085 — Optical Fiber Mount, RPP305 ...................................................................................................... 60
139086 — Integrating Sphere Mount, RPP305 ............................................................................................. 60
PA200 ............................................................................................................................................................... 61
PA200 BlueRay ......................................................................................................................................... 61
Chucks and Thermal Chuck Adapters.............................................................................................................. 61
53551 — ATT Chuck System, A200HS, + 15° C to + 150°C ............................................................................... 61
138722 — Thermal Chuck Adapter ............................................................................................................... 61
138723 — Thermal Chuck Adapter for Chuck with Lift Pins ........................... .............................................. 61
139873 — Double Side Chuck Plate .............................................................................................................. 61
143820 — Chuck, 200 mm, HF, PA200A ....................................................................................................... 62
143821 — Chuck, 200 mm, HF, AP200.......................................................................................................... 62
Miscellaneous Accessories ............................................................................................................................. 62
133371 — Operation Lamp 3 Colors ............................................................................................................ 62
133667 — Mount Arm for Monitor, Keyboard, Mouse, and Joysti ck ........................................................... 62
135080 — Adaptation Integrating Sphere 4 in Manual ................................................................................ 63
136687 — Measuring Instrume nt Shelf for BlueRay........... .......................................................................... 63
138390 — SE1000 to VIT700/701 Adapter ................................................................................................... 63