141-400-57-probestationaccessoriescatalog.pdf_-_141-400-probestationaccessoriescatalog_1.pdf.pdf - 第78页
PN 141-400 www.formfactor.com PA200 • 62 Revision 57, February, 2023 Probe Station A ccessories 143 82 0 — C hu ck , 200 mm , HF , P A200 A Feat ur es • Chuc k insulated from machine • V acuu m fixture for two calibratio…
PN 141-400 www.formfactor.com PA200 • 61
Revision 57, February, 2023 Probe Station Accessories
PA200
PA200 BlueRay
CHUCKS AND THERMAL CHUCK ADAPTERS
53551 — ATT Chuck System, A200HS, +15°C to +150°C
Features
• RS232 Interface
• Air used for cooling
• Operated via the interfaces on
the controller or through the
probe station control software
• Complete system consists of
200 mm (8 in) chuck, controller, cooling unit
• Requires additional thermal chuck adapter for BlueRay, with or
without lift pins (138722 or 138723)
Specifications
• Temperature range: +15 to +15 0°C (59° to 302°F)
• Temperature resolution: 0.01°C (3 2°F)
• Temperature accuracy: +/- 0.2°C (32.4°F)
• Heating rate:
– 25 150°C (77 302°F): < 8 min
– 15 25°C (59 7 7°F): < 2 min
• Cooling rates:
– 25° 15°C (77° 59°F): < 6 min
– 150° 25°C (302° 77°F): < 18 min
• Temperature uniformity:
– 15…100°C (5 9°...212°F): < +/- 1K
– >100°C (212°F): +/- 1%
• Flatness: < +/-12 µm (0.5 mils)
• Power supply: 100-127/208-240 V 5 0/60 Hz AC 800 VA
• Air supply: 200 l/min at 6 bar dewpoint <-10°C (50°F) oil free
Compatibility
• PA200 Bl ueRay
138722 — Thermal Chuck Adapter
Features
• Adapter for ATT chuck
system A200HS+15
• Thermal and electrical
insulation of chuck to
machine
Compatibility
• PA200 BlueRay
138723 — Thermal Chuck Adapter for Chuck with Lift
Pins
Features
• Adapter for ATT chuck system A200HS+15
• Thermal and electrical insulation of chuck to machine
• With lift pins for loader application
Compatibility
• PA200 BlueRay
139873 — Double Side Chuck Plate
Features
• Top plate for doub le side chuck
• To be used on PA200 DS
BlueRay
• For 76 mm (3 in) wafer, held by
clamping mechanism
• 1 mm (0.04 in) circumferential
support
• Front cutout for vacuum wand
• Other chucks on request
Compatibility
• PA200 DS BlueRay
PN 141-400 www.formfactor.com PA200 • 62
Revision 57, February, 2023 Probe Station Accessories
143820 — Chuck, 200 mm, HF, PA200A
Features
• Chuck insulated from
machine
• Vacuum fixture for two
calibration substrates or
probe cleaning pads
• Vacuum zones for 50 mm
(2 in), 100 mm (4 in), 150
mm (6 in), and 200 mm (8 in) wafers
• Single d ie vacuum location
• Material: stainless steel (others available on request)
• Flat surface with vacuum holes (0.8 mm [0.03 in] Ø)
Compatibility
• PA200A BlueRay
143821 — Chuck, 200 mm, HF, AP200
Features
• Chuck insulated from machine
• Vacuum fixture for two
calibration substrates or probe
cleaning pa ds
• Vacuum zones for 50 mm (2
in), 100 mm (4 in), 15 0 mm (6
in), and 200 mm (8 in) wafers
• Single d ie vacuum location
• Material: stainless steel (others available on request)
• Flat surface with vacuum holes (0.8 mm [0.03 in] Ø)
Compatibility
• AP20 0 BlueRay
MISCELLANEOUS ACCESSORIES
133371 — Operation Lamp 3 Colors
Features
• Colors: red, yellow, green
• Programmable through probe station control
software
• Red light can be programmed static or blinking
• 800 mm (31.5 in) pole (when combined with the
instrument measurement shelf [136687], the
mounting pole is reduced to 400 mm [15.7 in])
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
133667 — Mount Arm for M onitor, Keybo ard, Mouse,
and Joystick
Features
• Mount arm for flat panel monitor,
mouse and joystick or Expert
Control Panel
• Includes compact computer
keyboard (US English)
• High quality pneumatic springs
and two revolving joints
• Swing, tilt and r otate for optimum
ergonomic positioning
• Dynamically adjustable to any
working height
• Requires a mach ine table 700 or VIT701/800/801 for mounting
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
PN 141-400 www.formfactor.com PA200 • 63
Revision 57, February, 2023 Probe Station Accessories
135080 — Ad aptation Integrating Sphere 4 in Manual
Features
• Integrating sphere holder for
PA200 BlueRay DS
• Manual sphere adjustment
• Mount for integrating sphere 10 2
mm (4 in) LabSphere (sphere not
part of this item)
• Other spheres can be adapted on request
• Cannot be combined with automatic loader
Specifications
• Move men t Range X/Y: 2 5 mm ( 1 in)
• Move men t Range Z: 10 mm (0.4 in)
Compatibility
• PA200 Bl ueRay
136687 — Measuring Instrument Shelf for BlueRay
Features
• Two planes for measurement
equipment
Specifications
• Dimensions (W x D): 350 x 380 mm
(13.8 x 15 in) each
• Max. load : 30 k g (66 lb)
Compatibility
• PA200 Bl ueRay, PA200 DS BlueRay
• Cannot be combined with shield enclosures
138390 — SE1000 to VIT700/701 Adapter
Features
• Connects the SE1000 to the
700 series pro be station tables
• By using the VIT701, vibrations
of the ShieldEnclosure are
isolated from the probe station
Compatibility
• PA200 Bl ueRay, PA200 DS
BlueRay
• Not compatible with BlueRay loader module
138651 — Pneumatic Switch Terminal
Features
• Terminal is moun ted to BlueRay platen
• Used for switching cal-site vacuum supply
Compatibility
• PA200 BlueRay (not compatible with the
BlueRay DS)
139985 — Adaptation Integrating Sphere 4 in Motorized
Features
• Integrating sphere holder for PA200
BlueRay DS
• Motorized/programmable sphere
adjustment
• Mount for integrating sphere 102 mm
(4 in) LabSphere (sphere not part of
this item)
• Other spheres can be adapted on request
• Can be combined with automatic loader
Specifications
• Movement range X/Y: 25 mm (1 in)
• Movement range Z: 25 mm (1 in)
Compatibility
• PA200 BlueRay