141-400-57-probestationaccessoriescatalog.pdf_-_141-400-probestationaccessoriescatalog_1.pdf.pdf - 第51页
PN 141-400 www.formfactor.com Lab Accessories and Miscellaneous • 35 Revision 57, February, 2023 Probe Station A ccessories • Gr ound strap Compa tibil ity • CM300x i, T ESLA300, Elite 300, PM 300, SUMM IT200, TESLA200, …
PN 141-400 www.formfactor.com Lab Accessories and Miscellaneous • 34
Revision 57, February, 2023 Probe Station Accessories
• Purge air 150 l/min (5.3 CFM)
• Outlet pressure dew point depe nding on inlet pressure, inlet
pressure dew point and flow rate
• Requires yearly exchange of filter unit
Application Example
• Inlet pre ssure 7 bar/0.7 MPa/101.5 psi, inlet pressure dew point
+3°C (37.4°F), inlet air flow 390 l/ min (13.8 CFM)
• Outlet pressure dew point -45 °C (-49 °F)
• Outlet air flow 240 l/min (8.5 CFM)
M150-ACC-13 — Vacuum Manifold, Magnetic Base
Features
• 5 port vacuum manifold
• Magnet base mounts at the most
convenient location (e.g., on platen)
• For use with vacuum based positioners
or other vacuum based accessories
• Easy pu sh-pull on/off controls
Specifications
• Input connection: 3 mm (1/8 in) ID push on connector
• Output connections:1.5 mm (1/16 in) ID
Compatibility
• CM300xi, TESLA300, Elite 300, SUMMIT200, TESLA200, Summit,
T200, M150, Ales si
M150-ACC-16 — Magnetic Cable Clamp
Kit
Features
• Magnetic base cable clamp
• Ena bles easy cable routing
• Helps to minimize cable vibration that can affect measurements
• Groove in base holds cable securely
Kit Contents
• Each kit includes the necessary hardware for one cable
• Maximum cable diameter = 3 mm (1/8-inch)
• Must be used with steel base
Compatibility
CM300xi, TESLA300, Elite 300, PM300, SUMMIT200, TESLA200,
Summit, T200, M150, Ales si
M150-ACC-18 — Pin to Banana Interface Kit
Features
• Six port pin jack to banana jack interface
with magnetic base
• Used with unshielded probes (e.g., MMP-
01 or 139-332) to convert to a banana
style output
• Magnet base enables convenient placement b ased on your
positioner locations
Kit Contents
• One 6 port interface
Compatibility
• CM300xi, T ESLA300, Elite 300, PM300, SUMMIT200, TESLA200,
Summit, T200, M150, Alessi
M150-ACC-19 — Triax Panel, Magnetic Base
Features
• Triax connection panel for
convenient cable management
• Magnet base enables convenient
placement based on your positioner
location
• 10 Triax (3-lug) feed through
connectors (female)
• Panel connections su pport single triax cables and Keysight dua l
triax SMU cable assemblies. For Keysight Quadrax SMU
connections, please contact the factory.
Kit Contents
• Magnet base connection panel
• Ground strap
Compatibility
• CM300xi, T ESLA300, Elite 300, PM300, SUMMIT200, TESLA200,
Summit, T200, M150, Alessi
M150-ACC-28 — Coax Panel, Magnetic Base
Features
• Coxial connection panel for convenient
cable management
• Magnet base allows for convenient
placement based on you r positioner
location
• 10 Coaxial feed through connectors
(female)
Kit Contents
• Magnet base connection panel
PN 141-400 www.formfactor.com Lab Accessories and Miscellaneous • 35
Revision 57, February, 2023 Probe Station Accessories
• Ground strap
Compatibility
• CM300xi, TESLA300, Elite 300, PM300, SUMMIT200, TESLA200,
Summit, T200, M150, Ales si
PN 141-400 www.formfactor.com Manual Stations • 36
Revision 57, February, 2023 Probe Station Accessories
Manual Stations
PM8
100507 — Supply Kit for Vacuum Adapter
Features
• For vacuum clamping of positioners on magnetic or HF platen
Compatibility
• PM8
190-243 — ATT Auxiliary Chuck 160/200 mm for ISS up
to 22.2mm
Features
• Add itional chuck for one calibration
Substrate, custom ISS and/or burnishing
pad u p to 22.2mm*22.2mm, for 160mm or
200mm ATT thermal chuck
• Up to two additional chucks can be mounted
at front-left and front-right position
• Requires vacuum switches for HF chuck:
– PN 100539 for PA200/PM8
Compatibility:
• PA200, PA200 BlueRay, PM8 with 160 mm (6 in) / 200 mm (8 in)
ATT thermal chuck
PM300
133270 — Ad ditional Chuck for Two Substrates
Features
• Add itional chuck for 2 calibration substrates and/or burnishing
pads
Compatibility
• PM300
190-244 — ATT Auxiliary Chuck 300 mm dual for ISS up
to 22.2mm
Features
• Additional chuck for two calibration
substrates, custom ISS and/or burnishing
pad u p to 22.2mm*22.2mm, for 300mm
ATT thermal chuck
• Can be mounted at front-left position
• Requires vacuum switches for HF chuck
(PN 1 00539)
Compatibility:
• PA300, PM30 0 with 300 mm ATT thermal chuck, PM300PS