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PN 141-400 www.formfactor.com Optical • 60 Revision 57, February, 2023 Probe Station A ccessories Optic al In te gr a ti ng Sp he re a nd Mo un t s 535 41 — In tegr a tin g S pher e , Zen ith Feat ur es • Di f fuse, high…

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PN 141-400 www.formfactor.com Microscopes • 59
Revision 57, February, 2023 Probe Station Accessories
• USB3 cable
• White light LED for microscope illumination port
Compatibility
• PA210 Bl ueRay, Summit 12000, EPS150, PM8, PM300
Requirements
• Velox 3.1 and above
780-00536 — Velox for Manual Stations Kit, Velox, USB
Camera
Features
Velox for manual probe
stations. The ex clusive
AugmentedAlign tool
provides on-screen
markers that impr ove
measurement accuracy
and simplify RF probe
positioning. The kit
contains a digital camera,
connection cable, and Velox for man ual probe stations.
Specifications
• Digital video camera, 2592 x1944 pixel, 1/2.5-inch sensor
• USB3 cable
• Velox for manual probe stations
Compatibility
• EPS15 0, PM8, PM300
Requirements
• Cus tomer PC or laptop, o r 782-00081 high performance controller
for manual probe stations
782-00119 — Velox Digital Camera Kit USB3 w/o light
5MP
Features
Velox digital camera package for FormFactor probe stations
configured with C-mount microscopes. The camera is supported by
the SPECTRUM Vision System. Velox probe station control software
is required.
Specifications
• Digital video camera, 2592 x1944 pixel, 1/2.5-inch sensor
• USB3 cable
Compatibility
• Summit 12000, EPS150, PM8, PM300
Requirements
• Velox 3.1 and above
EPS-ACC-HDTV+ — Digital TV Package
Features
• Video recording and
live view, without a
computer
• Integrated menu
system driven by a
mouse for low
overhead
• Saves stills and video
direct to a memory card and outputs to an HDMI monitor
Specifications
• Moticam 4000
• 1/1.8-inch CMOS with C-mount a nd mounting thread
• Capture resolution on SD-card:
– Still image: 8.0MP (7.68 x 4.32 mm)
– Video: 4K 384 0 x 2160
• Live display mode thr ough output
– USB: 3840 x 2160 @ 20 frames per s econd
or
– HDMI : 3840 x 2160 (4K) @ 30 frames per second
• Pixel size: 2.0 x 2.0 microns
• Data transfer: HDMI and USB 2.0
• SD card slot (maximal: 32 GB)
• Motic Images Plus 3.0 application software for PC and Mac
• Still and live image capture function
• 24 in wide screen monitor
– HDMI , DisplayPort and VGA inputs
– 178° wide-angle v iewing
• SD-Card
– RAM size 32 GB
– Data rate 80 MB/s
– Form factor SDHC
• USB computer
– USB pl ug for connection to MOTICAM 4000
– 1.80 m (6 ft) c able for convenient and ergonomic operation
Compatibility
• MPS150, EPS150 (excluding EPS150TESLA, EPS150TESLA-
EDU and SE750), PM8, EPS200
PN 141-400 www.formfactor.com Optical • 60
Revision 57, February, 2023 Probe Station Accessories
Optical
Integrating Sphere and Mounts
53541 — Integrating S phere, Zenith
Features
• Diffuse, high reflective coating,
recommended for UV-VIS-NIR
wavelength
• Maximum temperature: 150°C (302°F)
• Input port 6 mm (1/4 in) (cutting edge in
design)
• One detector port 6 mm (1/4 in) with
baffles and blind plug
• SMA connector fiber optic cable
Compatibility
• Required for 134826, 139086
134826 — Integrating Sphere Mount, Mitutoyo FS70
Features
• Mounting of 1 in integrating sphere into man ual
objective t urret
Compatibility
• FS70
139085 — Optical Fiber Mount, RPP305
Features
• Mounting for Instrument Systems EKT-fiber
Specifications
• Positioner arm with pneumatic cylinder,
40 mm (1.5 in) stroke, for mov ing optical
fiber out of microscope field of view
Compatibility
• PA200, PA200 BlueRay, PM8, PM5 +
RPP305-S (and former PH250)
139086 — Integrating Sphere Mount, RPP305
Features
• Positioner arm with pneumatic cylinder, 40 mm (1.5 in) stroke, for
moving sphere out of microscope field of view
• Mounting for Integrating Sphere 1 in, OptoWhite/Zenith
Compatibility
• PA200, PA200 BlueRay, PM8, PM5 + RPP305-S (and former
PH250)
PN 141-400 www.formfactor.com PA200 • 61
Revision 57, February, 2023 Probe Station Accessories
PA200
PA200 BlueRay
CHUCKS AND THERMAL CHUCK ADAPTERS
53551 — ATT Chuck System, A200HS, +15°C to +150°C
Features
• RS232 Interface
• Air used for cooling
• Operated via the interfaces on
the controller or through the
probe station control software
• Complete system consists of
200 mm (8 in) chuck, controller, cooling unit
• Requires additional thermal chuck adapter for BlueRay, with or
without lift pins (138722 or 138723)
Specifications
• Temperature range: +15 to +15 0°C (59° to 302°F)
• Temperature resolution: 0.01°C (3 2°F)
• Temperature accuracy: +/- 0.2°C (32.4°F)
• Heating rate:
– 25 150°C (77 302°F): < 8 min
– 15 25°C (59 7 7°F): < 2 min
• Cooling rates:
– 25° 15°C (77° 59°F): < 6 min
– 150° 25°C (302° 77°F): < 18 min
• Temperature uniformity:
– 15…100°C (5 9°...212°F): < +/- 1K
– >100°C (212°F): +/- 1%
• Flatness: < +/-12 µm (0.5 mils)
• Power supply: 100-127/208-240 V 5 0/60 Hz AC 800 VA
• Air supply: 200 l/min at 6 bar dewpoint <-10°C (50°F) oil free
Compatibility
• PA200 Bl ueRay
138722 — Thermal Chuck Adapter
Features
• Adapter for ATT chuck
system A200HS+15
• Thermal and electrical
insulation of chuck to
machine
Compatibility
• PA200 BlueRay
138723 — Thermal Chuck Adapter for Chuck with Lift
Pins
Features
• Adapter for ATT chuck system A200HS+15
• Thermal and electrical insulation of chuck to machine
• With lift pins for loader application
Compatibility
• PA200 BlueRay
139873 — Double Side Chuck Plate
Features
• Top plate for doub le side chuck
• To be used on PA200 DS
BlueRay
• For 76 mm (3 in) wafer, held by
clamping mechanism
• 1 mm (0.04 in) circumferential
support
• Front cutout for vacuum wand
• Other chucks on request
Compatibility
• PA200 DS BlueRay