M6_ServiceManual_e.pdf - 第85页

5 Materials 5-3 Part Name Part No. Qty. Rema rks Signal Cable (SMEM A) 1 LG0-M56K0-01X (1) SMEMA - SMEMA Signal Cable 1 LG0-M56K0-61X (1) SMEMA - Open Signal Cable (Std.) 1 LG0-M56K0-11X SMEMA – Tenryu Pre-process cable …

100%1 / 90
5 Materials
5-2
Standard Accessories
Part Name Part No. Qty. Remarks
NOZ.P030 ASSY. LC8-M771R-00X
NOZ.P031 ASSY. LC6-M7712-00X
NOZ.P032 ASSY. LC6-M7714-00X
NOZ.P033 ASSY. LC6-M7716-00X
NOZ.P034 ASSY. LC6-M7718-00X
NOZ.P005 ASSY. LC6-M7709-00X
NOZ.P006 ASSY. LC6-M770B-00X
NOZ.P012 ASSY. LC6-M770D-00X
NOZ.P013 ASSY. LC6-M770F-00X
NOZ.P017 ASSY. LC6-M770H-00X
NOZ.P018 ASSY. LC6-M770K-00X
NOZ.P019 ASSY. LC6-M770M-00X
NOZ.P020 ASSY. LC6-M770P-00X
NOZ.P042 ASSY. LC6-M7724-00X
Six arbitrary nozzle
assemblies are supplied as
standard accessory.
ID SEAL P030 LC6-M77DF-00X
ID SEAL P031 LC6-M77DG-00X
ID SEAL P032 LC6-M77DH-00X
ID SEAL P033 LC6-M77DJ-00X
ID SEAL P034 LC6-M77DK-00X
ID SEAL P005 LC6-M77D5-00X
ID SEAL P006 LC6-M77D6-00X
ID SEAL P012 LC6-M77D7-00X
ID SEAL P013 LC6-M77D8-00X
ID SEAL P017 LC6-M77D9-00X
ID SEAL P018 LC6-M77DA-00X
ID SEAL P019 LC6-M77DB-00X
ID SEAL P020 LC6-M77DC-00X
ID SEAL P042 LC6-M77DM-00X
One extra ID sticker is
supplied as a spare for each
nozzle.
ID SEAL TOOL, ASSY. LC1-M8903-00X 1set
PIN (O RING) LC1-M8911-00X 1 O-ring inserter pin
REMOVER, O-RING LC1-M861R-01X 1
Support Pin (Magnet type) LC8-M9820-00X 60mm
Support Pin (Fixed-length type) LC8-M9901-00X 24 60mm
5 Materials
5-3
Part Name Part No. Qty. Remarks
Signal Cable (SMEMA)
1
LG0-M56K0-01X (1) SMEMA - SMEMA
Signal Cable
1
LG0-M56K0-61X (1) SMEMA - Open
Signal Cable (Std.)
1
LG0-M56K0-11X
SMEMA – Tenryu
Pre-process cable
Signal Cable (Std.)
1
LG0-M56K0-21X
SMEMA – Tenryu
Post-process cable
SCREW DRIVER(-) LG0-M89A2-00X
MANOMETER ASSY. LG0-M89A5-00X
LENS CLEANER SET LG0-M89A4-00X 1
GREASE SILICON LG0-M89AB-00X 1
17-INCH LCD MONITOR LC8-M6571-00X 1
KEYBOARD ASSY.(ENG) KW3-M5150-60X 1 IBM AT, PS/2 compatible
MOUSE KW3-M5169-04X 1
With wheel, PS/2,
Mini DIN 6pin
SEPARATOR,ASSY. LG0-M340C-00X 16 or 24
Depends on machine
configuration
SET MASTER PCJ-1 LG0-M5C00-00X
NOZZLE CLEANING WIRE KV8-M8887-00X 1
NOZZLE CLEANER KIT LG0-M5J00-00X
COUPLER LG0-M89A1-00X For 8.5mm/12.5mm dia. hose
GREASE
LG0-M86A3-00X
1
AFA grease for linear guide
GREASE
K48-M3856-00X
LR3 grease for ball screw
GREASE GUN SET LG0-M86A1-00X
MG70
GREASE GUN NOZZLE LC8-M86A1-00X
NZ3
FDD (USB connection)
1
6m signal cable, Customer Selectable
5 Materials
5-4
Replacement Parts
Head Manifold Section
Part Name Part No. Qty. Remarks
FILTER ELEMENT LG0-M71A9-00X 6
AIR FILTER ASSY. LG0-M71A4-00X 6
SILENCER ELEMENT LG0-M71A8-00X 6
GENERATOR,VACUUM LG0-M71A3-00X 6 Vacuum Generator
NOTE: “Qty.” indicates the quantity required for each machine.
Nozzle Section
Part Name Part No. Qty. Remarks
O RING LC1-M77A5-90X 1
Common for
P005,P006,P013,
P018,P019,P020
RUBB.PAD17 LG0-M77A0-00X 1 Rubber pad for P017
RUBB.PAD18 LG0-M77A1-00X 1 Rubber pad for P018
RUBB.PAD19 LG0-M77A2-00X 1 Rubber pad for P019
RUBB.PAD20 LG0-M77A9-00X 1 Rubber pad for P020
NOTE: “Qty.” indicates the quantity required for each nozzle.
Air Regulator Section
Part Name Part No. Qty. Remarks
FILTER ELEMENT LG0-M86A2-10X 1 For mist separator
NOTE: “Qty.” indicates the quantity required for each machine.
Grease
Part Name Part No. Qty. Remarks
GREASE K48-M3856-00X 1 LR3 (80g)
GREASE,AFA LG0-M86A3-00X 1 AFA Grease (70g)
GREASE,AFB LG0-M86A4-00X 1 AFB Grease (70g)
GREASE SILICON LG0-M89AB-00X 1 Silicone Grease (10g)