presentazione_laboratorio.pdf
ITC-irst Researchers 217 Post docs 13 PhD students 20 250 MM area FCS – Physics & Chemistry o f Surfaces and Interfaces MIS – Microsystems IT area SRA – Automated Reasoning Sytems SSI – Interactive Sensory Systems TC…
ITC-irst
Researchers 217
Post docs 13
PhD students 20
250
MM area
FCS – Physics & Chemistry of Surfaces and Interfaces
MIS – Microsystems
IT area
SRA – Automated Reasoning Sytems
SSI – Interactive Sensory Systems
TCC – Cognitive and Communication Technologies
MIS Microsystems
Head of Department: Mario Zen
The department designs and realises silicon
microsystems, especially:
• silicon particle detectors;
• sensors for bio-medical and environmental
applications;
• micro-electro-mechanic systems (MEMS) for
industrial and consumer applications;
• electro-optic microsystems for vision and non-
destructive measurements.
Low temperature Wafer Bonding
MEMS Technological fabrication modules
Silicon anisotropic etching with TMAH solution
Composite suspended membranes
Lithography with thick film of photoresist
Gold Electrodeposition