presentazione_laboratorio.pdf - 第6页
Etching Sector Dry etching Aluminium, SiO 2 , Si 3 N 4 and Poly Wet etching
Lithographic Sector
Mask Aligner A “Karl Suss MA 150 BSA”
Resist processing systems “SVG 8600” and “EVG 150”.
Etching Sector
Dry etching
Aluminium, SiO
2
, Si
3
N
4
and Poly
Wet etching
Metalization
Varian 3180 sputtering
Ulvac EBX-16C evaporator