presentazione_laboratorio.pdf - 第7页
Metalization Varian 3180 sputtering Ulvac EBX-16C evaporator
Etching Sector
Dry etching
Aluminium, SiO
2
, Si
3
N
4
and Poly
Wet etching
Metalization
Varian 3180 sputtering
Ulvac EBX-16C evaporator
Furnaces
Furnaces 11 horizontal furnaces
diffusion,LPCVD depositions, Si3N4,
Polysilicon, TEOS, BPSG and LTO