presentazione_laboratorio.pdf - 第8页
Furnaces Furnaces 11 horizontal furnaces diffusion,LPCVD depositions, Si3N4, Polysilicon, TEOS, BPSG and LTO
Metalization
Varian 3180 sputtering
Ulvac EBX-16C evaporator
Furnaces
Furnaces 11 horizontal furnaces
diffusion,LPCVD depositions, Si3N4,
Polysilicon, TEOS, BPSG and LTO
Ion Implanter
Varian E 220 medium current