presentazione_laboratorio.pdf - 第9页
Ion Implanter Varian E 220 medium current
Furnaces
Furnaces 11 horizontal furnaces
diffusion,LPCVD depositions, Si3N4,
Polysilicon, TEOS, BPSG and LTO
Ion Implanter
Varian E 220 medium current
Inspection Sector
• Olympus MX50 microscope
• Leitz MPV-SP Interferometer for thickness control.
• 4 point Napson RT8-8 for resistivity control.
• Plasmos SD 2300 Ellipsometer for refraction index control