YSB55w_KLG_pl.pdf - 第57页
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47
45
Rack Assy
Wafer Elevation
KLY-1608
21-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M172A-00
PLATE1, RACK
1
2
KLY-M172D-00
PLATE, TOP
1
3
KLY-M172G-00
RAIL 3
2
4
KLY-M172H-00
BRACKET, SENSOR
1
5
KLY-M172J-00
RACK LOCK ASSY.
1
6
KLY-M1731-00
PLATE 1, RAIL
2
7
KLY-M1734-00
RAIL 8
1
8
KLY-M1735-00
RAIL 9
2
9
KLY-M173R-00
RAIL 12
2
10
KLY-M173S-00
PLATE 3, RAIL
2
11
KLY-M173T-00
BLOCK, STOPPER
1
12
KLY-M17SC-00
PLATE 3, RACK
1
13
KLY-M17SD-00
PLATE 4, RACK
1
14
KLY-M17SE-00
PLATE 5, RACK
1
15
KLY-M17SF-00
PLATE 6, RACK
1
16
KLY-M17W6-00
PLATE, COVER
1
17
KLY-M654B-00
SENS,CST DET ASSY
1
18
KLC-M910N-00
SPACER
8
19
$NK-3N
NYLON CLIP
5
20
90990-31J023
BOLT, SHOULDER
2
21
90990-28J141
WASHER,PLAIN
8
22
90990-41J138
COLLAR
12
23
90990-41J166
COLLAR
2
24
90990-11J001
SCREW, PAN HEAD W/W
5
25
98902-03010
SCREW BINDING HEAD
2
26
92012-04006
BOLT, BOTTON HEAD
8
27
91312-04005
BOLT HEX,SOCKET HEAD
16
28
91312-04006
BOLT HEX,SOCKET HEAD
6
29
91312-04008
BOLT HEX,SOCKET HEAD
8
30
91312-04010
BOLT HEX,SOCKET HEAD
8
31
91312-04020
BOLT HEX,SOCKET HEAD
2
32
91312-05008
BOLT HEX,SOCKET HEAD
10
33
91312-05010
BOLT HEX,SOCKET HEAD
6
34
92902-04200
WASHER,PLAIN
12
35
92902-05200
WASHER,PLAIN
22
36
KLY-M17A1-00
PLATE, SET
1
37
KLY-M172U-00
PLATE 2, FRAME
2
38
KLY-M172Y-00
RAIL 7
1
39
KLY-M1735-00
RAIL 9
2
40
KLY-M1736-00
PLATE, ANGLE
2
41
KLY-M173R-00
RAIL 12
2
42
KLY-M173S-00
PLATE 3, RAIL
1
43
KLC-M910N-00
SPACER
4
44
90990-28J141
WASHER,PLAIN
6
45
90990-41J138
COLLAR
7
46
91312-04005
BOLT HEX,SOCKET HEAD
4
47
91312-04006
BOLT HEX,SOCKET HEAD
11
48
91312-04008
BOLT HEX,SOCKET HEAD
4
49
92012-04006
BOLT, BOTTON HEAD
4
50
92902-04200
WASHER,PLAIN
4
51
KLY-M1729-00
RACK ASSY.
1
52
91312-05014
BOLT HEX,SOCKET HEAD
6
12
16
3
20
4
16
22
2
14
22
11
21
19
22
5
13
19
9
7
10
15
1
6
19
22
16
14
23
17
18
11
16
8
12
16
3
20
4
16
22
2
14
22
11
21
19
22
5
13
19
9
7
10
15
1
6
19
22
16
14
23
17
18
11
16
8
Cover Assy
Wafer Elevation
KLY-1608
21-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M17K1-00
COVER, FRONT
1
2
KLY-M17K2-00
COVER, RIGHT
1
3
KLY-M17K3-00
COVER, LEFT
1
4
KLY-M17K4-01
COVER, REAR
1
5
KLY-M17K9-01
PLATE, RACK
2
6
KLY-M17LF-01
PLATE 2, RACK
1
7
KLY-M17LG-01
COVER 2, REAR
1
8
KLY-M17LJ-00
COVER 2, RIGHT
1
9
KLY-M17LP-00
COVER, DRAIN
1
10
KLY-M17LS-00
COVER 3, REAR
1
11
KLY-M173L-00
STAY 2, CONNECT
2
12
KH2-M1130-00
CATCH,MAGNET
2
13
KV7-M1396-00
WASHER
4
14
90990-11J003
SCREW, PAN HEAD W/W
8
15
90990-11J004
SCREW, PAN HEAD W/W
4
16
90990-46J010
BOLT, THIN HEAD
37
17
90990-28J082
WASHER,PLAIN
8
18
90990-28J127
WASHER,PLAIN
8
19
92902-05200
WASHER,PLAIN
6
20
98702-03006
SCREW,FLAT HEAD
4
21
91312-04008
BOLT HEX,SOCKET HEAD
3
22
91312-05010
BOLT HEX,SOCKET HEAD
14
23
91312-06012
BOLT HEX,SOCKET HEAD
8
21
21
36
36
35
19
11
4
30
24
31
14
31
34
9
18
28
29
37
20
32
13
7
36
17
23
23
32
26
12
22
26
33
26
18
22
35
27
5
3
26
35
26
18
33
11
6
38
10
31
26
24
30
13
23
37
36
11
26
28
26
17
8
26
26
23
34
29
35
14
2
15
16
1
25
21
21
36
36
35
19
11
4
30
24
31
14
31
34
9
18
28
29
37
20
32
13
7
36
17
23
23
32
26
12
22
26
33
26
18
22
35
27
5
3
26
35
26
18
33
11
6
38
10
31
26
24
30
13
23
37
36
11
26
28
26
17
8
26
26
23
34
29
35
14
2
15
16
1
25
Door Assy
Wafer Elevation
KLY-1608
21-6
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M17KH-00
COVER, OPEN
1
2
KLY-M17KJ-00
PANEL, DOOR
1
3
KLY-M17KK-00
FRAME, REAR
1
4
KLY-M17KL-00
FRAME, RIGHT
1
5
KLY-M17KM-00
FRAME, LEFT
1
6
KLY-M17KN-00
FRAME, FRONT
1
7
KLY-M17KP-00
PLATE, KEY
1
8
KLY-M17KT-00
BRKT. R, SPRING
1
9
KLY-M17KU-00
BRKT. L, SPRING
1
10
KLY-M17L3-00
HANDLE
1
11
KLY-M17L4-00
FRAME 2, FRONT
3
12
KLY-M17L5-00
PLATE 2, KEY
1
13
KLY-M17L8-00
DAMPER
2
14
KLY-M17LK-00
PLATE
2
15
KLY-M17LM-00
SEAL, TRIM
1
16
KLY-M17LR-00
D RUBBER 450
1
17
KGS-M1348-00
GAS,SPRING
2
18
KGS-M1360-00
BOLT
6
19
KL0-M1374-00
PLATE 1, SCHMEASAL
1
20
KW7-M5127-00
SAFETY SWITCH KEY
1
21
K46-M1374-12
HINGE 2
2
22
90990-12J003
SCREW, BIN. HEAD W/W
12
23
90990-31J006
BOLT, SHOULDER
4
24
90990-41J057
COLLAR
2
25
90990-46J015
BOLT, THIN HEAD
8
26
91312-04010
BOLT HEX,SOCKET HEAD
21
27
91312-05010
BOLT HEX,SOCKET HEAD
2
28
91312-05025
BOLT HEX,SOCKET HEAD
2
29
91312-06008
BOLT HEX,SOCKET HEAD
4
30
91312-06010
BOLT HEX,SOCKET HEAD
4
31
95702-04500
NUT FLANGE
18
32
95302-04600
NUT HEXAGON
4
33
95302-05600
NUT HEXAGON
2
34
95302-06600
NUT HEXAGON
2
35
92902-04200
WASHER,PLAIN
22
36
92902-06200
WASHER,PLAIN
6
37
92902-05600
WASHER,PLAIN
2
38
KLY-M17KG-00
DOOR, ASSY.
1