YSB55w_KLG_pl.pdf - 第73页
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Wafar Table Assy
Wafer Table
KLY-1608
24-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M9214-00
SHAFT
4
2
KLY-M9216-00
GEAR,RING
2
3
KLY-M9218-00
BELT,DRIVE
1
4
KLY-M9234-00
STAY,SENSOR
1
5
KLY-M9235-00
PLATE,SENSOR
1
6
KLY-M9237-00
STAY A
2
7
KLY-M9244-00
DOG
1
8
KLY-M924A-00
BRACKET,SENSOR
1
9
KLY-M924B-00
COVER,SENSOR
1
10
KLY-M9259-00
STAY,CABLE C
1
11
KLY-M9261-00
DUCT,HNS A
1
12
KLY-M9262-00
COVER,HNS A
1
13
KLY-M9263-00
BLOCK
1
14
KLY-M9264-00
BRACKET,CONNECTOR
1
15
KLY-M926A-00
COVER,GEAR
1
16
KLY-M92E1-00
RING,EXPAND A
1
17
KLY-M2229-00
BRACKET,CABLE C
1
18
KLY-M222A-00
BRACKET,CABLE E
1
19
KLY-M653B-00
SENS,RING ENT ASSY
1
20
KLY-M653C-00
SENS,RING CENT ASSY
1
21
KJY-M3B1C-A0
CLAMP,HNS
6
22
90166-02J204
SCREW, PAN HEAD
6
23
90169-02J206
SCREW, BINDING HEAD
2
24
90563-04J200
SPACER
4
25
90990-01J038
BOLT HEX,SOCKET HEAD
3
26
90990-01J059
BOLT HEX,SOCKET HEAD
4
27
90990-11J003
SCREW, PAN HEAD W/W
10
28
90990-28J078
WASHER,PLAIN
2
29
91312-03006
BOLT HEX,SOCKET HEAD
5
30
91312-03008
BOLT HEX,SOCKET HEAD
2
31
91312-04006
BOLT HEX,SOCKET HEAD
4
32
91312-04008
BOLT HEX,SOCKET HEAD
18
33
91312-04010
BOLT HEX,SOCKET HEAD
9
34
91312-04014
BOLT HEX,SOCKET HEAD
6
35
91312-05016
BOLT HEX,SOCKET HEAD
2
36
91312-06020
BOLT HEX,SOCKET HEAD
2
37
91312-06025
BOLT HEX,SOCKET HEAD
2
38
92902-04200
WASHER,PLAIN
4
39
92902-04600
WASHER,PLAIN
6
40
92902-05200
WASHER,PLAIN
2
41
98502-03005
SCREW PAN HEAD
6
42
$CTAM1
ANCHOR MOUNT
8
43
$NK-3N
NYLON CLIP
2
5
22
3
10
9
6
25
15
7
19
4
16
27
21
12
13
26
25
21
24
17
21
11
22
26
20
20
8
21
2
20
20
27
18
14
23
1
23
5
22
3
10
9
6
25
15
7
19
4
16
27
21
12
13
26
25
21
24
17
21
11
22
26
20
20
8
21
2
20
20
27
18
14
23
1
23
LA / LE Drive
Wafer Table
KLY-1608
24-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92R0-00
LA DRIVE ASSY.
1
2
KLY-M92S0-00
LE DRIVE ASSY.
1
3
KLY-M92T0-00
LA SENSOR ASSY.
1
4
KLY-M92U0-00
LE SENSOR ASSY.
1
5
KLY-M92V0-00
CABLE BRACKET ASSY.
1
6
KLY-M9228-00
PLATE,MOTOR LA
1
7
KLY-M9229-00
GEAR,MOTOR
1
8
KLY-M9221-00
PULLEY,MOTOR
1
9
KLY-M9222-00
PLATE,MOTOR LE
1
10
KLY-M9252-00
BLOCK
1
11
KKX-M925D-00
SCREW,ADJUST
2
12
KLY-M9233-00
BRACKET,SENSOR
1
13
KLY-M653A-00
SEN,LA ORG ASSY
1
14
KLY-M9254-00
PLATE,NUT M3
1
15
KLY-M653E-00
SEN,LE ORG ASSY
1
16
KLY-M2211-00
BRACKET,CABLE A
1
17
KLY-M9245-00
BRACKET,SENSOR
1
18
90KA1-107H72
AC SERVO MOTOR
1
19
90KA1-107K61
AC SERVO MOTOR
1
20
90990-02J008
SCREW, SET
4
21
90990-11J003
SCREW, PAN HEAD W/W
23
22
91312-04008
BOLT HEX,SOCKET HEAD
4
23
91312-05012
BOLT HEX,SOCKET HEAD
8
24
91312-05008
BOLT HEX,SOCKET HEAD
2
25
98502-03008
SCREW PAN HEAD
4
26
$NK-3N
NYLON CLIP
2
27
$CTAM1
ANCHOR MOUNT
21
19
24
2
15
17
2
23
14
3
3
20
7
27
13
21
16
5
6
1
29
22
3
21
29
26
11
8
32
34
31
10
30
18
31
10
18
9
33
12
34
28
31
25
4
29
25
4
29
19
24
2
15
17
2
23
14
3
3
20
7
27
13
21
16
5
6
1
29
22
3
21
29
26
11
8
32
34
31
10
30
18
31
10
18
9
33
12
34
28
31
25
4
29
25
4
29
Base
Wafer Ejector
KLG-1608
25-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
$KM-05
MUFFLER
1
2
$SC4-M5MA
SPEED CONTROLLER
2
3
$TL4-M5M
JOINT
3
4
90K81-200004
CAP C4
10
5
KLY-M654F-00
EJEC UP VALVE ASSY
1
6
KLY-M653H-00
SENS, EJEC UP ASSY
1
7
KLY-M653J-00
SENS, EJEC UP ASSY
1
8
KLY-M9701-00
PLATE,BASE 1
1
9
KLY-M9702-00
PLATE,BASE 2
1
10
KLY-M9703-00
RIB,BASE
2
11
KLY-M9704-00
PLATE,BASE
1
12
KLY-M9710-00
BRACKET,STOPPER
1
13
KLY-M9713-00
BRACKET,CYLINDER
1
14
KLY-M9714-00
CYLINDER
1
15
KLY-M9716-00
SHOCK ABSORBER 2
1
16
KLY-M9720-00
BRACKET,SENSOR
1
17
KLY-M9722-00
BRACKET,DUCT
1
18
KLY-M9729-00
GUIDE, ASSY.
2
19
KLY-M97A1-000
EJECTOR BASE
1
20
KLY-M9728-00
FLOATING JOINT
1
21
91312-03006
BOLT HEX,SOCKET HEAD
4
22
91312-03014
BOLT HEX,SOCKET HEAD
2
23
91312-04008
BOLT HEX,SOCKET HEAD
2
24
91312-04010
BOLT HEX,SOCKET HEAD
4
25
91312-04018
BOLT HEX,SOCKET HEAD
10
26
91312-05025
BOLT HEX,SOCKET HEAD
4
27
91312-05030
BOLT HEX,SOCKET HEAD
4
28
91312-05035
BOLT HEX,SOCKET HEAD
2
29
91312-06016
BOLT HEX,SOCKET HEAD
8
30
91312-06020
BOLT HEX,SOCKET HEAD
4
31
91312-08030
BOLT HEX,SOCKET HEAD
6
32
99480-05010
PIN,PARALLEL
6
33
99480-05012
PIN,PARALLEL
2
34
99480-05014
PIN,PARALLEL
4