YSB55w_KLG_pl.pdf - 第88页
2 3 23 18 23 13 24 16 15 23 8 5 7 21 4 12 24 24 17 23 23 14 23 23 19 1 23 24 11 25 6 20 22 9 24 26 10 2 3 23 18 23 13 24 16 15 23 8 5 7 21 4 12 24 24 17 23 23 14 23 23 19 1 23 24 11 25 6 20 22 9 24 26 10 Rear Block W afe…
4
1
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
7
25
5
29
23
9
24
4
1
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
7
25
5
29
23
9
24
Front Block
Wafer Shuttle ST
KLY-1608
29-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7SA1-00
SHUTTLE ST. A1 ASSY.
1
2
KLY-M7SB1-00
SHUTTLE ST. B1 ASSY.
1
3
KLY-M7SCL-00
SHUTTLE BLOCK ASSY.
1
4
KLY-M7SCR-00
SHUTTLE BLOCK ASSY.
1
parts same as 3
5
KLY-M7S70-00
BRKT.,TRANS.
2
6
KLY-M7S27-00
BRKT.,BELT 1
2
7
KLY-M7S29-00
BRKT.,BELT FIX
2
8
KLY-M7S38-00
BRKT.,CABLE FIX
2
9
KLY-M7S39-00
BRKT.,CABLE FIX
3
10
KLY-M7S51-00
COVER,SHUTTLE 1
2
11
KLY-M7S20-00
BLOCK,SHUTTLE
2
12
KLY-M7S21-00
ROD,NOZZLE
16
13
KLY-M7S23-00
SPRING
16
14
KLY-M7S25-00
ARM,DRIVE
2
15
KLY-M7S26-00
PLATE,SHUTTLE
2
16
KLY-M7S2C-00
POST,MARK
2
17
KLY-M7S2D-00
MECH STOPPER
2
18
KLF-M96HM-00
PIN,MARK
2
19
$TSH4-M3M
JOINT
16
20
90990-18J002
PIN,PARALLEL
4
21
90990-19J006
NEEDLE PIN
16
22
90112-2AJ005
BOLT, HEX.SOCKET HEAD
10
23
91312-03004
BOLT HEX,SOCKET HEAD
16
24
91312-03006
BOLT HEX,SOCKET HEAD
16
25
91312-03012
BOLT HEX,SOCKET HEAD
28
26
91312-03025
BOLT HEX,SOCKET HEAD
2
27
91312-04006
BOLT HEX,SOCKET HEAD
4
28
92A08-03003
SCREW,SET
2
29
KLY-M7SA2-00
SHUTTLE ST. A2 ASSY.
1
cf. next page
30
KLY-M7SB2-00
SHUTTLE ST. B2 ASSY.
1
cf. next page
2
3
23
18
23
13
24
16
15
23
8
5
7
21
4
12
24
24
17
23
23
14
23
23
19
1
23
24
11
25
6
20
22
9
24
26
10
2
3
23
18
23
13
24
16
15
23
8
5
7
21
4
12
24
24
17
23
23
14
23
23
19
1
23
24
11
25
6
20
22
9
24
26
10
Rear Block
Wafer Shuttle ST
KLY-1608
29-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7SA2-00
SHUTTLE ST. A2 ASSY.
1
2
KLY-M7SB2-00
SHUTTLE ST. B2 ASSY.
1
3
KLY-M7SCR-00
SHUTTLE BLOCK ASSY.
1
4
KLY-M7SCL-00
SHUTTLE BLOCK ASSY.
1
parts same as 3
5
KLY-M7S20-00
BLOCK,SHUTTLE
2
6
KLY-M7S21-00
ROD,NOZZLE
16
7
KLY-M7S23-00
SPRING
16
8
KLY-M7S25-00
ARM,DRIVE
2
9
KLY-M7S26-00
PLATE,SHUTTLE
2
10
KLY-M7S2C-00
POST,MARK
2
11
KLY-M7S2D-00
MECH STOPPER
2
12
KLF-M96HM-00
PIN,MARK
2
13
KLY-M7S28-00
BRKT.,BELT 2
2
14
KLY-M7S29-00
BRKT.,BELT FIX
2
15
KLY-M7S38-00
BRKT.,CABLE FIX
2
16
KLY-M7S39-00
BRKT.,CABLEFIX
2
17
KLY-M7S51-00
COVER,SHUTTLE 1
2
18
KLY-M7S54-00
COVER,SHUTTLE 2
2
19
$TSH4-M3M
JOINT
16
20
90990-18J002
PIN,PARALLEL
4
21
90990-19J006
NEEDLE PIN
16
22
90112-2AJ005
BOLT, HEX.SOCKET HEAD
10
23
91312-03006
BOLT HEX,SOCKET HEAD
36
24
91312-03012
BOLT HEX,SOCKET HEAD
28
25
91312-03025
BOLT HEX,SOCKET HEAD
2
26
92A08-03003
SCREW,SET
2
28
26
4
11
35
25
5
17
19
24
7
23
36
9
3
11
38
18
25
11
19
34
37
6
31
25
8
13
30
28
3
24
14
20
33
10
24
4
1
27
26
24
2
20
32
14
19
19
22
32
23
16
19
19
11
15
21
25
12
34
29
31
23
28
26
4
11
35
25
5
17
19
24
7
23
36
9
3
11
38
18
25
11
19
34
37
6
31
25
8
13
30
28
3
24
14
20
33
10
24
4
1
27
26
24
2
20
32
14
19
19
22
32
23
16
19
19
11
15
21
25
12
34
29
31
23
Axis Drive
Wafer Shuttle ST
KLY-1608
29-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S02-00
FRAME,SHUTTLE ASSY.
2
2
KLY-M7S14-00
BELT 2GT
2
3
KLY-M7S15-00
IDLE PULLEY ASSY.
4
4
KLY-M7S16-00
BRKT.,PULLEY
4
5
KLY-M7S1A-00
HOLDER,MOTOR
2
6
KLY-M7S1C-00
BELT 2GT
2
7
KLY-M7S1F-00
BRKT.,ADJUST
2
8
KLY-M7S1H-00
BRKT.,ADJUST 3
2
9
KLY-M7S1K-00
BRKT.,PRELOAD
4
10
KLY-M7S1M-00
SPRING
4
11
KLY-M7S1P-01
DRIVE PULLEY 2GT-20
4
12
KLY-M7S1T-00
BRKT.,CONN.
2
13
KLY-M7S1U-00
BRKT.,ADJUST
2
14
KGS-M9140-A0
PULLEY CONV. ASSY.
4
15
KLH-M3437-01
BOLT
2
16
KLH-M3438-01
COLLAR
2
17
KLH-M3439-00
SPHERICAL BEARING
2
18
KLH-M3440-00
PLATE,STOPPER
2
19
90990-02J005
SET, SCREW
8
20
90990-41J008
COLLAR
4
21
90K2F-0R1042
AC SERVO MOTOR
1
22
90K2F-0R1043
AC SERVO MOTOR
1
23
91312-03006
BOLT HEX,SOCKET HEAD
14
24
91312-03008
BOLT HEX,SOCKET HEAD
26
25
91312-03010
BOLT HEX,SOCKET HEAD
16
26
91312-05012
BOLT HEX,SOCKET HEAD
4
27
91312-05016
BOLT HEX,SOCKET HEAD
4
28
91312-05030
BOLT HEX,SOCKET HEAD
4
29
92902-03200
WASHER,PLAIN
2
30
92902-05200
WASHER,PLAIN
4
31
91312-04008
BOLT HEX,SOCKET HEAD
4
32
91312-05010
BOLT HEX,SOCKET HEAD
4
33
91312-05030
BOLT HEX,SOCKET HEAD
4
34
92902-04200
WASHER,PLAIN
4
35
KLY-M7SA3-00
SHUTTLE AXIS A ASSY.
1
36
KLY-M7SB3-00
SHUTTLE AXIS B ASSY.
1
37
90K2F-0R1044
AC SERVO MOTOR
1
38
90K2F-0R1045
AC SERVO MOTOR
1