YSB55w_KLG_pl.pdf - 第70页
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13
13
4
15
14
16
1
3
10
12
2
5
20
7
14
17
19
3
12
10
11
18
9
8
6
20
11
13
13
4
15
14
16
1
3
10
12
2
5
20
7
14
17
19
3
12
10
11
18
9
8
6
20
11
Expand Assy
Wafer Table
KLY-1608
24-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92N0-00
EXPAND ASSY.
1
2
KLY-M92P0-00
EXPAND PLATE ASSY.
1
3
KLY-M9240-00
GUIDE A ASSY.
2
4
KLY-M9204-00
BASE 2,RING
1
5
KLY-M9219-00
GUIDE A
2
6
KLY-M9239-00
BRACKET,SENSOR
1
7
KLY-M9246-00
STAY,CABLE A
1
8
KLY-M9253-00
PLATE,NUT M2
1
9
KLY-M653D-00
SENS,RING SET ASSY
1
10
91312-05010
BOLT HEX,SOCKET HEAD
6
11
91312-05016
BOLT HEX,SOCKET HEAD
8
12
99480-04012
PIN,PARALLEL
2
13
99480-05018
PIN,PARALLEL
4
14
90933-02J623
BEARING
16
15
90990-28J133
WASHER,PLAIN
8
16
99480-03010
PIN,PARALLEL
8
17
90171-02J026
WASHER,PLAIN
2
18
90563-03J150
SPACER
2
19
90990-10J009
SCREW,BINDING HEAD
2
20
91312-03006
BOLT HEX,SOCKET HEAD
4
13
9
9
13
8
18
15
27
6
1
5
11
26
1
1
9
4
9
5
4
14
28
13
5
4
28
4
7
13
15
27
16
6
17
15
27
16
29
6
22
16
10
24
1
31
17
26
15
2
14
27
28
28
18
16
23
29
5
22
25
6
21
24
31
20
12
3
28
19
32
30
28
26
28
28
26
13
9
9
13
8
18
15
27
6
1
5
11
26
1
1
9
4
9
5
4
14
28
13
5
4
28
4
7
13
15
27
16
6
17
15
27
16
29
6
22
16
10
24
1
31
17
26
15
2
14
27
28
28
18
16
23
29
5
22
25
6
21
24
31
20
12
3
28
19
32
30
28
26
28
28
26
LE Table Assy
Wafer Table
KLY-1608
24-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92M0-00
LE BALL SCREW ASSY.
4
2
KLY-M9206-00
BALL SCREW
4
3
KLY-M9202-00
PLATE 2, BASE
1
4
KLY-M9207-00
PULLEY,BALL SCREW
4
5
KLY-M9209-00
HOLDER,BEARING
4
6
KLY-M9213-00
SHAFT
4
7
KLY-M9217-00
BELT,MAIN
1
8
KLY-M9231-00
SCREW,ADJUST
1
9
KLY-M9249-00
MECHA LOCK
4
10
KLY-M9220-00
GUIDE BL ASSY.
1
11
KLY-M9230-00
GUIDE BR ASSY.
1
12
KLY-M92D0-00
CAM FOLLOWER ASSY.
4
13
KHT-M7314-00
LOCK NUT
4
14
KJX-M9152-00
STOPPER,REAR
4
15
KJY-M92B1-20
BALL BUSH
4
16
KJY-M92B2-00
STOPPER,GUIDE
4
17
KLY-M922E-00
GUIDE B
2
18
KLY-M922H-00
RING,SHIM
6
19
KLY-M92D1-00
BLOCK,CAM FOLLOWER
4
20
KJY-M92E3-00
WASHER,CAM FOLLOWER
4
21
KJY-M92MA-00
CAM,FOLLOWER
4
22
90933-02J623
BEARING
6
23
90933-02J626
BEARING
4
24
90990-01J043
BOLT HEX,SOCKET HEAD
6
25
99009-06400
CIRCLIP
4
26
91312-03010
BOLT HEX,SOCKET HEAD
8
27
91312-04008
BOLT HEX,SOCKET HEAD
16
28
91312-04010
BOLT HEX,SOCKET HEAD
16
29
91312-04016
BOLT HEX,SOCKET HEAD
4
30
91312-05012
BOLT HEX,SOCKET HEAD
8
31
99480-05018
PIN,PARALLEL
4
32
95302-05600
NUT HEXAGON
4
2
3
28
17
18
21
7
10
21
25
21
7
1
39
28
37
28
22
28
16
5
15
23
30
35
33
23
31
19
8
38
21
24
36
34
29
20
32
33
12
14
11
29
27
13
4
26
36
9
29
28
8
6
13
2
3
28
17
18
21
7
10
21
25
21
7
1
39
28
37
28
22
28
16
5
15
23
30
35
33
23
31
19
8
38
21
24
36
34
29
20
32
33
12
14
11
29
27
13
4
26
36
9
29
28
8
6
13
LA Table Assy
Wafer Table
KLY-1608
24-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M9201-00
PLATE 1,BASE
1
2
KLY-M92A0-00
IDLER A ASSY.
4
3
KLY-M92B0-00
IDLER B ASSY.
8
4
KLY-M92C0-00
IDLER C ASSY.
1
5
KLY-M92F0-00
TENSIONER ASSY.
1
6
KLY-M92G0-00
RING BASE 1 ASSY.
1
7
KLY-M9208-00
PLATE,BEARING
4
8
KLY-M921A-00
PLATE 1,SUPPORT
2
9
KLY-M9224-00
BEARING
1
10
KLY-M9227-00
DOG,R
1
11
KLY-M9251-00
STOPPER
2
12
KHY-M9154-00
SPACER
2
13
KLY-M92A1-00
COLLAR,IDLER
12
14
KGK-M9145-00
PULLEY,TENSIONER
4
15
KLY-M92C1-00
PULLY C,IDLER
1
16
KLY-M92C2-00
COLLAR C,IDLER
1
17
KLY-M92F1-00
COLLAR,TENSIONER
1
18
KLY-M92F2-00
WASHER,PLAIN
1
19
KLY-M9232-00
NUT,BLOCK
1
20
90563-14J060
SPACER
2
21
90933-02J626
BEARING
8
22
90990-01J016
BOLT HEX,SOCKET HEAD
8
23
90990-01J049
BOLT HEX,SOCKET HEAD
16
24
90990-11J003
SCREW, PAN HEAD W/W
2
25
90990-28J032
WASHER,PLAIN
8
26
90990-28J083
WASHER,PLAIN
8
27
90933-02J608
BEARING
4
28
90990-25J024
BEARING
24
29
90990-28J118
WASHER,PLAIN
13
30
91312-04005
BOLT HEX,SOCKET HEAD
2
31
91312-04008
BOLT HEX,SOCKET HEAD
8
32
91312-04016
BOLT HEX,SOCKET HEAD
2
33
91312-05020
BOLT HEX,SOCKET HEAD
8
34
91312-06022
BOLT HEX,SOCKET HEAD
8
35
92902-04600
WASHER,PLAIN
2
36
91312-05030
BOLT HEX,SOCKET HEAD
12
37
91312-05040
BOLT HEX,SOCKET HEAD
1
38
97002-05020
BOLT,HEXAGON
1
39
$CTAM1
ANCHOR MOUNT
2