YSB55w_KLG_pl.pdf - 第83页
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4
5
3
8
10
12
2
1
10
7
11
9
10
6
9
4
5
3
8
10
12
2
1
10
7
11
9
10
6
9
Shank/Dust Box
Flip Head Section
KLG-1608
27-4
B
A
B
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KHT-M2688-00
MAGNET
1
2
KLY-M653N-00
SENS,DUST BOX A ASSY
1
A
3
KLY-M653N-10
SENS,DUST BOX B ASSY
1
B
4
KLY-M71C1-00
SHANK,12U ASSY F.
1
A
5
KLY-M71C1-10
SHANK,12C ASSY F.
1
B
6
KLY-M9902-00
BOX,CHIP
1
7
KLY-M9903-00
BRKT.,BOX
1
8
KLY-M9904-00
BRKT.,MAGNET
1
9
91312-03004
BOLT HEX,SOCKET HEAD
2
10
91312-03008
BOLT HEX,SOCKET HEAD
6
11
92902-03200
WASHER,PLAIN
2
12
98702-03006
SCREW,FLAT HEAD
1
37
38
24
2
4
11
33
25
15
24
16
34
22
22
23
23
5
23
8
6
23
31
8
27
29
7
35
13
2
12
31
27
29
30
27
17
1
26
18
27
23
32
19
24
10
26
14
9
20
27
18
3
36
24
21
28
37
38
24
2
4
11
33
25
15
24
16
34
22
22
23
23
5
23
8
6
23
31
8
27
29
7
35
13
2
12
31
27
29
30
27
17
1
26
18
27
23
32
19
24
10
26
14
9
20
27
18
3
36
24
21
28
LTYA / B Axis Assy
Wafer Traverser
KLY-1608
28-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7T02-00
BASE,LT
1
2
KLY-M7T04-00
RIB,BASE
2
3
KLY-M7T05-00
HOLDER,MOTOR LT
1
4
KLY-M7T08-00
HOLDER,NUT
1
5
KLY-M7T09-00
PLATE,LT
1
6
KLY-M7T0B-00
STOPPER,LTZ
1
7
KLY-M7T0C-00
COVER,BS.
1
8
KLY-M7T0D-00
GUIDE,LT
2
9
KLY-M7T0F-00
COUPLING
1
10
KLY-M7T0G-00
PLATE,BEARING
1
11
KLY-M7T0H-00
BRKT.,HNS.
1
12
KLY-M7T0J-00
BALL SCREW
1
13
KLY-M7T0K-00
BEARING
1
14
KLY-M7T0L-00
LOCK NUT
1
15
KLY-M7T0P-00
COVER,GUIDE
1
16
KLY-M7T19-00
BRKT.,CABLE
1
17
KLY-M7T30-00
BASE,CABLE
1
18
KGS-M5184-00
SEAL,EARTH 1
2
19
KHN-M712A-00
BEARING
1
20
KLY-M7T40-00
BRKT.,TRNS.
1
21
90KA1-A06270
AC SERVO MOTOR
1
22
91312-03004
BOLT,HEX.SOCKET HEAD
16
23
91312-03006
BOLT,HEX.SOCKET HEAD
12
24
91312-03010
BOLT,HEX.SOCKET HEAD
34
25
91312-03012
BOLT,HEX.SOCKET HEAD
4
26
91312-03020
BOLT,HEX.SOCKET HEAD
4
27
91312-04010
BOLT,HEX.SOCKET HEAD
15
28
91312-05012
BOLT,HEX.SOCKET HEAD
4
29
91312-05025
BOLT,HEX.SOCKET HEAD
3
30
92902-04200
WASHER, PLAIN
1
31
92902-05200
WASHER, PLAIN
3
32
97602-04308
SCREW,PAN HEAD W/W
1
33
99480-03008
PIN, PARALLEL
2
34
99480-03012
PIN, PARALLEL
2
35
99480-05010
PIN, PARALLEL
1
36
KLY-M7TA1-00
LTYA AXIS ASSY.
1
37
KLY-M7TB1-00
LTYB AXIS ASSY.
1
38
90KA1-A05271
AC SERVO MOTOR
1
15
25
32
22
23
29
9
36
20
27
15
24
18
16
5
35
31
21
14
26
17
28
29
36
22
21
3
37
4
28
35
5
33
28
12
31
1
32
13
33
29
29
2
10
31
32
30
40
19
34
29
6
29
6
34
7
29
39
29
30
8
38
11
34
38
33
29
15
25
32
22
23
29
9
36
20
27
15
24
18
16
5
35
31
21
14
26
17
28
29
36
22
21
3
37
4
28
35
5
33
28
12
31
1
32
13
33
29
29
2
10
31
32
30
40
19
34
29
6
29
6
34
7
29
39
29
30
8
38
11
34
38
33
29
LTZA / B Axis Assy
Wafer Traverser
KLY-1608
28-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7TA4-00
FLAME,LTZA ASSY.
1
Cf. Next page
2
KLY-M7TA5-00
PLATE,LTZA ASSY.
1
Cf. Next page
3
KLY-M7T13-00
HOLDER,NUT LTZ
2
4
KLY-M7T15-00
COVER,BS LTZ
2
5
KLY-M7T16-00
COVER,BS LTZ
4
6
KLY-M7T19-00
BRKT.,CABLE
4
7
KLY-M7T1C-00
BRKT.,CABLE
2
8
KLY-M7T1D-00
COVER,CABLE
2
9
KLY-M7T1E-00
SPRING,RETURN
2
10
KLY-M7T1F-00
COUPLING
2
11
KLY-M7T1H-00
BRKT.,CABLE
2
12
KLY-M7T1K-00
BALL SCREW ASSY.
2
13
KLY-M7T20-00
ARM,NOZZLE A
1
14
KLY-M7T22-00
RIB,NOZZLE
2
15
KLY-M7TC2-00
ADJ.,SHANK ASSY.
2
16
KLY-M7T25-00
ROD,SHANK
2
17
KLY-M7T27-00
COVER,TUBE
2
18
KLY-M7T28-00
O-RING
2
19
KLY-M7153-00
O-RING
2
20
KLY-M7T23-00
ADJ.,SHANK
2
21
KLY-M7T29-00
PROTECTOR,SPRING
4
22
KG7-M7137-A0
LEAF SPRING
4
23
KLY-M7TB2-00
LTZB AXIS ASSY.
1
24
KLY-M7T21-00
ARM,NOZZLE B
1
25
KLY-M7TA2-00
LTZA AXIS ASSY.
1
26
90112-02J006
BOLT,HEX.SOCKET HEAD
4
27
90KB0-111305
AC SERVO MOTOR ASSY
1
28
91312-03004
BOLT,HEX.SOCKET HEAD
24
29
91312-03006
BOLT,HEX.SOCKET HEAD
30
30
91312-03008
BOLT,HEX.SOCKET HEAD
26
31
91312-03010
BOLT,HEX.SOCKET HEAD
18
32
91312-03012
BOLT,HEX.SOCKET HEAD
14
33
91312-04010
BOLT,HEX.SOCKET HEAD
8
34
97602-04308
SCREW,PAN HEAD W/W
12
35
90112-02J003
BOLT,HEX.SOCKET HEAD
4
36
90990-19J005
NEEDLE PIN
8
37
90KB0-111306
AC SERVO MOTOR ASSY
1
38
$CTAM1
ANCHOR MOUNT
8
39
$NK-2N
NYLON CLIP
2
40
$TL4-M3M
JOINT
2