YSB55w_KLG_pl.pdf - 第85页
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25
32
22
23
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9
36
20
27
15
24
18
16
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35
31
21
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26
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35
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33
28
12
31
1
32
13
33
29
29
2
10
31
32
30
40
19
34
29
6
29
6
34
7
29
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29
30
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11
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38
33
29
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25
32
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23
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36
20
27
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31
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26
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28
29
36
22
21
3
37
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28
35
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33
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12
31
1
32
13
33
29
29
2
10
31
32
30
40
19
34
29
6
29
6
34
7
29
39
29
30
8
38
11
34
38
33
29
LTZA / B Axis Assy
Wafer Traverser
KLY-1608
28-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7TA4-00
FLAME,LTZA ASSY.
1
Cf. Next page
2
KLY-M7TA5-00
PLATE,LTZA ASSY.
1
Cf. Next page
3
KLY-M7T13-00
HOLDER,NUT LTZ
2
4
KLY-M7T15-00
COVER,BS LTZ
2
5
KLY-M7T16-00
COVER,BS LTZ
4
6
KLY-M7T19-00
BRKT.,CABLE
4
7
KLY-M7T1C-00
BRKT.,CABLE
2
8
KLY-M7T1D-00
COVER,CABLE
2
9
KLY-M7T1E-00
SPRING,RETURN
2
10
KLY-M7T1F-00
COUPLING
2
11
KLY-M7T1H-00
BRKT.,CABLE
2
12
KLY-M7T1K-00
BALL SCREW ASSY.
2
13
KLY-M7T20-00
ARM,NOZZLE A
1
14
KLY-M7T22-00
RIB,NOZZLE
2
15
KLY-M7TC2-00
ADJ.,SHANK ASSY.
2
16
KLY-M7T25-00
ROD,SHANK
2
17
KLY-M7T27-00
COVER,TUBE
2
18
KLY-M7T28-00
O-RING
2
19
KLY-M7153-00
O-RING
2
20
KLY-M7T23-00
ADJ.,SHANK
2
21
KLY-M7T29-00
PROTECTOR,SPRING
4
22
KG7-M7137-A0
LEAF SPRING
4
23
KLY-M7TB2-00
LTZB AXIS ASSY.
1
24
KLY-M7T21-00
ARM,NOZZLE B
1
25
KLY-M7TA2-00
LTZA AXIS ASSY.
1
26
90112-02J006
BOLT,HEX.SOCKET HEAD
4
27
90KB0-111305
AC SERVO MOTOR ASSY
1
28
91312-03004
BOLT,HEX.SOCKET HEAD
24
29
91312-03006
BOLT,HEX.SOCKET HEAD
30
30
91312-03008
BOLT,HEX.SOCKET HEAD
26
31
91312-03010
BOLT,HEX.SOCKET HEAD
18
32
91312-03012
BOLT,HEX.SOCKET HEAD
14
33
91312-04010
BOLT,HEX.SOCKET HEAD
8
34
97602-04308
SCREW,PAN HEAD W/W
12
35
90112-02J003
BOLT,HEX.SOCKET HEAD
4
36
90990-19J005
NEEDLE PIN
8
37
90KB0-111306
AC SERVO MOTOR ASSY
1
38
$CTAM1
ANCHOR MOUNT
8
39
$NK-2N
NYLON CLIP
2
40
$TL4-M3M
JOINT
2
3
25
39
20
14
31
35
4
37
1
5
6
21
13
34
10
28
24
38
23
15
24
8
36
30
2
29
16
27
17
18
23
32
33
6
15
19
26
18
11
25
12
7
14
27
25
26
22
9
3
25
39
20
14
31
35
4
37
1
5
6
21
13
34
10
28
24
38
23
15
24
8
36
30
2
29
16
27
17
18
23
32
33
6
15
19
26
18
11
25
12
7
14
27
25
26
22
9
LTZA / B-sub
Wafer Traverser
KLY-1608
28-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7T14-00
HOLDER,BRG LTZ
2
2
KLY-M7T1G-00
BALL SCREW
2
3
KLH-M7C2A-00
BEARING
4
4
KLH-M7C2G-00
PLATE,BEARING
2
5
KLH-M7C2N-00
LOCK NUT,SCREW
2
6
KLH-M7C2P-00
SPACER
4
7
KLY-M7T10-00
FLAME,LTZ
2
8
KLY-M7T12-00
HOLDER,MOTOR LTZ
2
9
KLY-M7T18-00
STOPPER,LTZ UP
2
10
KLY-M7T1A-00
GUIDE,LTZ
2
11
KLY-M7T1B-00
GUIDE,LTZ
2
12
KLY-M653S-00
SENS,LTZA HIGH ASSY
1
13
KLY-M653S-10
SENS,LTZB HIGH ASSY
1
14
KHY-M711A-00
PIN,POST
4
15
KLC-M951R-00
STOPPER
4
16
KLY-M7T11-00
PLATE,LTZ
2
17
KLY-M7T17-00
DOG,LTZ
2
18
90990-02J004
SCREW, SET
4
19
91312-03012
BOLT HEX,SOCKET HEAD
8
20
99009-06800
CIRCLIP
2
21
90990-19J027
NEEDLE PIN
8
22
90990-33J002
BOLT, STOPPER
2
23
90990-41J180
COLLAR
4
24
91312-03006
BOLT HEX,SOCKET HEAD
20
25
91312-03010
BOLT HEX,SOCKET HEAD
8
26
91312-04010
BOLT HEX,SOCKET HEAD
4
27
92902-04600
WASHER,PLAIN
4
28
99480-03008
PIN,PARALLEL
6
29
90947-15JA00
BALL STEEL
2
30
90990-19J006
NEEDLE PIN
4
31
99480-03008
PIN,PARALLEL
4
32
99480-03012
PIN,PARALLEL
2
33
91312-03008
BOLT HEX,SOCKET HEAD
4
34
KLY-M7TA4-00
FLAME,LTZA ASSY.
1
35
KLY-M7TA5-00
PLATE,LTZA ASSY.
1
36
KLY-M7T1K-00
BALL SCREW ASSY.
1
37
KLY-M7TB4-00
FLAME,LTZB ASSY
1
38
KLY-M7TB5-00
PLATE,LTZB ASSY.
1
parts same as 35
39
KLY-M7T1K-00
BALL SCREW ASSY.
1
7
3
6
8
3
4
1
2
9
12
8
10
8
12
11
8
9
5
5
10
12
10
7
3
6
8
3
4
1
2
9
12
8
10
8
12
11
8
9
5
5
10
12
10
Valve Panel Assy
Wafer Traverser
KLY-1608
28-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7TA3-00
VALVE PANEL ASSY.
1
2
KLY-M7T31-00
BRKT.,VALVE
2
3
KLY-M7T32-00
COVER,VALVE
2
4
KLY-M7TVA-00
VALVE,ASSY.
1
5
KGS-M5184-10
SEAL,EARTH 1
4
6
KLY-M7TB3-00
VALVE PANEL ASSY.
1
7
KLY-M7TVB-00
VALVE,ASSY.
1
8
91312-03006
BOLT,HEX.SOCKET HEAD
8
9
91312-03012
BOLT,HEX.SOCKET HEAD
4
10
97602-04306
SCREW,PAN HEAD W/W
6
11
91312-04010
BOLT,HEX.SOCKET HEAD
4
12
$CTAM1
ANCHOR MOUNT
6