YSB55w_KLG_pl.pdf - 第66页
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Clamp Assy 3
Wafer Con.
KLY-1608
22-7
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M1785-00
BLOCK,CLAMP
2
2
KLY-M1786-00
CLAMP,UPPER
1
3
KLY-M1787-00
CLAMP,BOTTOM
1
4
KLY-M1788-00
PLATE,SUPPORT
1
5
KLY-M1789-00
SLOPE
2
6
KLY-M178S-00
COLLAR
4
7
KLY-M179C-00
PLATE,SENSOR
2
8
KLY-M17BN-00
COLLAR
4
9
KJG-M9752-00
SCREW STOPPER
2
10
KLY-M178B-00
CLAMP,UPPER
1
11
KLY-M178C-00
CLAMP, BOTTOM
1
12
KLY-M178D-00
PLATE,SUPPORT
1
13
KLY-M17A9-00
PLATE,SENSOR
2
14
KLY-M653T-10
SENS,HOOK CLOSE ASSY
1
15
KLY-M653T-00
SENS,HOOK OPEN ASSY
1
16
90933-03J085
BEARING
4
17
90990-41J176
COLLAR
2
18
90990-01J049
BOLT HEX,SOCKET HEAD
12
19
91312-03005
BOLT HEX,SOCKET HEAD
12
20
91312-03012
BOLT HEX,SOCKET HEAD
4
21
91312-03016
BOLT HEX,SOCKET HEAD
4
22
92902-03600
WASHER,PLAIN
4
23
91312-03004
BOLT HEX,SOCKET HEAD
4
24
91312-03006
BOLT HEX,SOCKET HEAD
4
9
45
34
10
39
41
26
13
15
20
7
35
8
31
46
42
28
18
16
38
41
29
23
25
32
45
22
38
20
39
4
6
9
28
37
10
35
38
41
14
17
29
38
16
2
30
21
29
41
3
11
33
43
24
34
45
5
19
42
35
33
27
40
12
39
45
6
30
35
33
16
31
40
12
29
17
10
30
28
17
9
38
35
10
28
41
35
9
1
4
41
41
36
41
41
35
12
44
17
16
30
9
45
34
10
39
41
26
13
15
20
7
35
8
31
46
42
28
18
16
38
41
29
23
25
32
45
22
38
20
39
4
6
9
28
37
10
35
38
41
14
17
29
38
16
2
30
21
29
41
3
11
33
43
24
34
45
5
19
42
35
33
27
40
12
39
45
6
30
35
33
16
31
40
12
29
17
10
30
28
17
9
38
35
10
28
41
35
9
1
4
41
41
36
41
41
35
12
44
17
16
30
LX Axis
Wafer Moving Axis
KLY-1608
23-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M2201-00
PLATE 1,BASE X
1
2
KLY-M2202-00
PLATE,FOOT A
1
3
KLY-M2203-00
PLATE,FOOT B
1
4
KLY-M2206-00
BLOCK,STOPPER 15
4
5
KLY-M2207-00
PLATE 2,BASE X
1
6
KLY-M22X0-00
LM GUIDE,LX AXIS
2
7
KLY-M22B0-00
BALL SCREW ASSY
1
8
KLY-M2209-00
HOLDER,BEARING
1
9
KLY-M2215-00
PLATE,STOPPER
4
10
KLY-M2216-00
DAMPER
4
11
KLY-M2222-00
DOG
1
12
KLY-M2233-00
BRACKET,JOINT
4
13
KLY-M2609-00
COVER,Y SCREW
1
14
KLY-M2612-00
BRACKET,BS COVER A
1
15
KLY-M9223-00
HOLDER,NUT
1
16
KHY-M266C-00
BLOCK,JOINT
4
17
KHY-M266D-00
JOINT
4
18
KM0-M2220-00
COUPLING, X-AXIS
1
19
KV7-M2641-00
HOLDER,MOTOR Y
1
20
KW6-M711H-00
GREASE NIPPLES
4
21
KLY-M2205-00
BALL SCREW
1
22
KG2-M9173-00
LOCK NUT
1
23
KHY-M264L-00
SPACER,BRG.SET
1
24
KV7-M2604-00
SUPPORT UNIT
1
25
90990-26J022
BEARING
1
26
92A08-04305
SCREW SET
1
27
90K65-514G14
AC SERVO MOTOR
1
28
90990-41J023
COLLAR
8
29
$BF4U
JOINT
4
30
90K81-000003
GREASE NIPPLE
4
31
90K81-200004
CAP C4
22
32
91312-03006
BOLT HEX,SOCKET HEAD
2
33
91312-03012
BOLT HEX,SOCKET HEAD
16
34
91312-04008
BOLT HEX,SOCKET HEAD
4
35
91312-04014
BOLT HEX,SOCKET HEAD
34
36
91312-04018
BOLT HEX,SOCKET HEAD
16
37
91312-05010
BOLT HEX,SOCKET HEAD
2
38
91312-05014
BOLT HEX,SOCKET HEAD
12
39
91312-05016
BOLT HEX,SOCKET HEAD
16
40
91312-06020
BOLT HEX,SOCKET HEAD
8
41
91312-06025
BOLT HEX,SOCKET HEAD
20
42
91312-06030
BOLT HEX,SOCKET HEAD
6
43
91312-06035
BOLT HEX,SOCKET HEAD
4
44
91312-06040
BOLT HEX,SOCKET HEAD
4
45
99480-03008
PIN,PARALLEL
4
46
99480-05010
PIN,PARALLEL
1
24
9
5
2
35
22
27
24
28
33
23
20
7
19
1
13
25
5
14
4
5
2
39
35
2
22
24
11
5
24
24
6
30
12
24
5
16
5
10
34
2
15
16
29
5
38
8
3
30
16
12
12
30
21
30
21
26
36
12
16
13
27
34
34
31
37
32
9
18
10
17
34
21
24
9
5
2
35
22
27
24
28
33
23
20
7
19
1
13
25
5
14
4
5
2
39
35
2
22
24
11
5
24
24
6
30
12
24
5
16
5
10
34
2
15
16
29
5
38
8
3
30
16
12
12
30
21
30
21
26
36
12
16
13
27
34
34
31
37
32
9
18
10
17
34
21
LY Stage
Wafer Moving Axis
KLY-1608
23-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26F0-00
LX SENSOR ASSY.
1
2
KLY-M2606-00
PLATE,CABLE Y
4
3
KLY-M2611-00
PLATE,CABLE Y2
1
4
KLY-M2213-00
PLATE,CABLE
1
5
KLY-M2615-00
SHEET,RUBBER
7
6
KLY-M2224-00
PLATE,CABLE X2
1
7
KLY-M2228-00
BRACKET,CABLE F
1
8
KLY-M2232-00
KNOB
1
9
KLY-M22C0-00
HOSE 1 ASSY.
2
10
KLY-M22D0-00
HOSE 2 ASSY.
2
11
KLY-M2604-00
BRACKET,CABLE E
1
12
KLY-M2204-00
BLOCK,STOPPER
4
13
KLY-M2231-00
GUIDE,HOSE
2
14
KLY-M2234-00
BRACKET,CABLE B
1
15
KLF-M2256-00
GRIP
1
16
KLY-M26C0-00
LY STOPPER ASSY.
4
17
KLY-M2616-00
BRACKET,STOPPER
1
18
KLY-M2216-00
DAMPER
1
19
KLY-M9248-00
BRACKET,SENSOR
1
20
KLY-M653F-00
SEN,LX ORG ASSY
1
21
KLF-M266D-00
JOINT
8
22
90990-11J003
SCREW, PAN HEAD W/W
4
23
91312-03006
BOLT,HEX.SOCKET HEAD
4
24
91312-03008
BOLT,HEX.SOCKET HEAD
28
25
91312-04006
BOLT,HEX.SOCKET HEAD
2
26
91312-08040
BOLT,HEX.SOCKET HEAD
1
27
91312-03016
BOLT,HEX.SOCKET HEAD
8
28
91312-04012
BOLT,HEX.SOCKET HEAD
4
29
91312-04018
BOLT,HEX.SOCKET HEAD
3
30
91312-06025
BOLT,HEX.SOCKET HEAD
8
31
90990-41J023
COLLAR
2
32
91312-05010
BOLT,HEX.SOCKET HEAD
2
33
98502-03008
SCREW PAN HEAD
2
34
91312-06014
BOLT,HEX.SOCKET HEAD
16
35
$NK-3N
NYLON CLIP
4
36
$UB0425-C
URETHANE TUBE
1
37
$UB0425-C
URETHANE TUBE
1
38
91312-05010
BOLT,HEX.SOCKET HEAD
4
39
KLY-M2605-00
BRACKET,CABLE F
1