YSB55w_KLG_pl.pdf - 第68页

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LY Stage
Wafer Moving Axis
KLY-1608
23-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26F0-00
LX SENSOR ASSY.
1
2
KLY-M2606-00
PLATE,CABLE Y
4
3
KLY-M2611-00
PLATE,CABLE Y2
1
4
KLY-M2213-00
PLATE,CABLE
1
5
KLY-M2615-00
SHEET,RUBBER
7
6
KLY-M2224-00
PLATE,CABLE X2
1
7
KLY-M2228-00
BRACKET,CABLE F
1
8
KLY-M2232-00
KNOB
1
9
KLY-M22C0-00
HOSE 1 ASSY.
2
10
KLY-M22D0-00
HOSE 2 ASSY.
2
11
KLY-M2604-00
BRACKET,CABLE E
1
12
KLY-M2204-00
BLOCK,STOPPER
4
13
KLY-M2231-00
GUIDE,HOSE
2
14
KLY-M2234-00
BRACKET,CABLE B
1
15
KLF-M2256-00
GRIP
1
16
KLY-M26C0-00
LY STOPPER ASSY.
4
17
KLY-M2616-00
BRACKET,STOPPER
1
18
KLY-M2216-00
DAMPER
1
19
KLY-M9248-00
BRACKET,SENSOR
1
20
KLY-M653F-00
SEN,LX ORG ASSY
1
21
KLF-M266D-00
JOINT
8
22
90990-11J003
SCREW, PAN HEAD W/W
4
23
91312-03006
BOLT,HEX.SOCKET HEAD
4
24
91312-03008
BOLT,HEX.SOCKET HEAD
28
25
91312-04006
BOLT,HEX.SOCKET HEAD
2
26
91312-08040
BOLT,HEX.SOCKET HEAD
1
27
91312-03016
BOLT,HEX.SOCKET HEAD
8
28
91312-04012
BOLT,HEX.SOCKET HEAD
4
29
91312-04018
BOLT,HEX.SOCKET HEAD
3
30
91312-06025
BOLT,HEX.SOCKET HEAD
8
31
90990-41J023
COLLAR
2
32
91312-05010
BOLT,HEX.SOCKET HEAD
2
33
98502-03008
SCREW PAN HEAD
2
34
91312-06014
BOLT,HEX.SOCKET HEAD
16
35
$NK-3N
NYLON CLIP
4
36
$UB0425-C
URETHANE TUBE
1
37
$UB0425-C
URETHANE TUBE
1
38
91312-05010
BOLT,HEX.SOCKET HEAD
4
39
KLY-M2605-00
BRACKET,CABLE F
1
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
23
22
5
15
11
21
25
10
13
19
29
30
1
16
20
4
22
12
32
27
18
27
3
18
26
24
31
14
17
25
28
LY Stage Y
Wafer Moving Axis
KLY-1608
23-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M26X0-00
GUIDE,LY
2
2
KLY-M22B0-00
BALL SCREW ASSY
1
3
KLY-M2205-00
BALL SCREW
1
4
KHY-M264L-00
SPACER,BRG.SET
1
5
KG2-M9173-00
LOCK NUT
1
6
KV7-M2604-00
SUPPORT UNIT
1
7
KLY-M26D0-00
LY SENSOR ASSY.
1
8
KLY-M2607-00
BRACKET,SENSOR
1
9
KLY-M653G-00
SEN,LY ORG ASSY
1
10
KLY-M2609-00
COVER,Y SCREW
1
11
KLY-M2612-00
BRACKET,BS COVER A
1
12
KLY-M2613-00
HOLDER,NUT LY
1
13
KLY-M2209-00
HOLDER,BEARING
1
14
KM0-M2220-00
COUPLING, X-AXIS
1
15
KV7-M2641-00
HOLDER,MOTOR Y
1
16
KLY-M2221-00
DOG
1
17
90K65-517315
AC SERVO MOTOR
1
18
90K81-200001
CAP C5
22
19
92A08-04305
SCREW SET
1
20
90990-26J022
BEARING (COMB.)
1
21
98502-03008
SCREW PAN HEAD
2
22
91312-03006
BOLT HEX,SOCKET HEAD
4
23
91312-04010
BOLT HEX,SOCKET HEAD
2
24
91312-04016
BOLT HEX,SOCKET HEAD
4
25
91312-05010
BOLT HEX,SOCKET HEAD
4
26
91312-05014
BOLT HEX,SOCKET HEAD
4
27
91312-05016
BOLT HEX,SOCKET HEAD
22
28
91312-06020
BOLT HEX,SOCKET HEAD
4
29
91312-06014
PIN,PARALLEL
3
30
91312-06025
BOLT HEX,SOCKET HEAD
2
31
91312-06030
BOLT HEX,SOCKET HEAD
4
32
99480-05010
PIN,PARALLEL
1
13
13
15
14
16
10
12
5
20
14
17
19
3
12
10
11
18
9
8
20
11
13
13
15
14
16
10
12
5
20
14
17
19
3
12
10
11
18
9
8
20
11
Expand Assy
Wafer Table
KLY-1608
24-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M92N0-00
EXPAND ASSY.
1
2
KLY-M92P0-00
EXPAND PLATE ASSY.
1
3
KLY-M9240-00
GUIDE A ASSY.
2
4
KLY-M9204-00
BASE 2,RING
1
5
KLY-M9219-00
GUIDE A
2
6
KLY-M9239-00
BRACKET,SENSOR
1
7
KLY-M9246-00
STAY,CABLE A
1
8
KLY-M9253-00
PLATE,NUT M2
1
9
KLY-M653D-00
SENS,RING SET ASSY
1
10
91312-05010
BOLT HEX,SOCKET HEAD
6
11
91312-05016
BOLT HEX,SOCKET HEAD
8
12
99480-04012
PIN,PARALLEL
2
13
99480-05018
PIN,PARALLEL
4
14
90933-02J623
BEARING
16
15
90990-28J133
WASHER,PLAIN
8
16
99480-03010
PIN,PARALLEL
8
17
90171-02J026
WASHER,PLAIN
2
18
90563-03J150
SPACER
2
19
90990-10J009
SCREW,BINDING HEAD
2
20
91312-03006
BOLT HEX,SOCKET HEAD
4