YSB55w_KLG_pl.pdf - 第90页
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Axis Drive
Wafer Shuttle ST
KLY-1608
29-3
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S02-00
FRAME,SHUTTLE ASSY.
2
2
KLY-M7S14-00
BELT 2GT
2
3
KLY-M7S15-00
IDLE PULLEY ASSY.
4
4
KLY-M7S16-00
BRKT.,PULLEY
4
5
KLY-M7S1A-00
HOLDER,MOTOR
2
6
KLY-M7S1C-00
BELT 2GT
2
7
KLY-M7S1F-00
BRKT.,ADJUST
2
8
KLY-M7S1H-00
BRKT.,ADJUST 3
2
9
KLY-M7S1K-00
BRKT.,PRELOAD
4
10
KLY-M7S1M-00
SPRING
4
11
KLY-M7S1P-01
DRIVE PULLEY 2GT-20
4
12
KLY-M7S1T-00
BRKT.,CONN.
2
13
KLY-M7S1U-00
BRKT.,ADJUST
2
14
KGS-M9140-A0
PULLEY CONV. ASSY.
4
15
KLH-M3437-01
BOLT
2
16
KLH-M3438-01
COLLAR
2
17
KLH-M3439-00
SPHERICAL BEARING
2
18
KLH-M3440-00
PLATE,STOPPER
2
19
90990-02J005
SET, SCREW
8
20
90990-41J008
COLLAR
4
21
90K2F-0R1042
AC SERVO MOTOR
1
22
90K2F-0R1043
AC SERVO MOTOR
1
23
91312-03006
BOLT HEX,SOCKET HEAD
14
24
91312-03008
BOLT HEX,SOCKET HEAD
26
25
91312-03010
BOLT HEX,SOCKET HEAD
16
26
91312-05012
BOLT HEX,SOCKET HEAD
4
27
91312-05016
BOLT HEX,SOCKET HEAD
4
28
91312-05030
BOLT HEX,SOCKET HEAD
4
29
92902-03200
WASHER,PLAIN
2
30
92902-05200
WASHER,PLAIN
4
31
91312-04008
BOLT HEX,SOCKET HEAD
4
32
91312-05010
BOLT HEX,SOCKET HEAD
4
33
91312-05030
BOLT HEX,SOCKET HEAD
4
34
92902-04200
WASHER,PLAIN
4
35
KLY-M7SA3-00
SHUTTLE AXIS A ASSY.
1
36
KLY-M7SB3-00
SHUTTLE AXIS B ASSY.
1
37
90K2F-0R1044
AC SERVO MOTOR
1
38
90K2F-0R1045
AC SERVO MOTOR
1
19
6
13
3
4
12
11
9
15
12
2
11
7
14
18
16
3
9
13
12
17
4
13
16
8
8
10
5
12
18
10
12
13
12
12
17
11
7
11
14
2
1
15
7
14
6
7
5
14
12
19
6
13
3
4
12
11
9
15
12
2
11
7
14
18
16
3
9
13
12
17
4
13
16
8
8
10
5
12
18
10
12
13
12
12
17
11
7
11
14
2
1
15
7
14
6
7
5
14
12
Frame / Guide
Wafer Shuttle ST
KLY-1608
29-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S10-00
FRAME,SHUTTLE
1
2
KLY-M7S12-00
BRKT.,PULLEY
2
3
KLY-M7S15-00
IDLE PULLEY ASSY.
2
4
KLY-M7S1E-00
BRKT.,ADJUST 1
2
5
KLY-M7S1R-00
GUIDE
2
6
KLY-M7S2H-00
COVER,BELT
2
7
KLY-M7S2J-00
BRKT.,COVER
4
8
KLY-M7S73-00
CLAMPING SCREW
2
9
KLY-M7S11-00
IDLE PULLEY 2GT-40
2
10
KLY-M7S13-00
SHAFT,IDLER
2
11
90933-03J685
BEARING
4
12
91312-03006
BOLT HEX,SOCKET HEAD
50
13
92902-03200
WASHER,PLAIN
8
14
90112-02J003
BOLT HEX,SOCKET HEAD
8
15
91312-03008
BOLT HEX,SOCKET HEAD
6
16
91312-03030
BOLT HEX,SOCKET HEAD
4
17
99480-03008
PIN,PARALLEL
2
18
99480-04014
PIN,PARALLEL
2
19
KLY-M7S02-00
FRAME,SHUTTLE ASSY.
1
19
18
4
5
13
16
15
14
11
13
9
13
12
2
1
17
14
16
10
16
17
7
3
9
6
8
19
18
4
5
13
16
15
14
11
13
9
13
12
2
1
17
14
16
10
16
17
7
3
9
6
8
Valve Panel
Wafer Shuttle ST
KLY-1608
29-5
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7S45-00
BRKT.,VALVE
2
2
KLY-M7S38-00
BRKT.,CABLE FIX
4
3
KLY-M7S47-00
BRKT.,VALVE 2
2
4
KLY-M7SVA-00
SHUTTLE VALVE A
1
5
KLY-M7SVB-00
SHUTTLE VALVE B
1
6
KLY-M654E-A0
SENS,S-A1 FLOW ASSY
1
7
KLY-M654E-B0
SENS,S-A2 FLOW ASSY
1
8
$KM-10
MUFFLER
1
9
KGS-M7742-00
LABEL,NOZZLE
2
10
KLY-M654E-C0
SENS,S-B1 FLOW ASSY
1
11
KLY-M654E-D0
SENS,S-B2 FLOW ASSY
1
12
KGS-M5184-00
SEAL,EARTH 1
2
13
91312-03006
BOLT HEX,SOCKET HEAD
20
14
91312-03008
BOLT HEX,SOCKET HEAD
8
15
97602-04306
SCREW PAN HEAD W/WASHER
4
16
91312-04008
BOLT HEX,SOCKET HEAD
8
17
92902-03200
WASHER,PLAIN
8
18
KLY-M7SA4-00
VALVE PANEL A ASSY
1
19
KLY-M7SB4-00
VALVE PANEL B ASSY
1