YSB55w_KLG_pl.pdf - 第87页

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3
6
8
3
4
9
12
8
10
8
12
11
8
5
10
12
10
3
6
8
3
4
9
12
8
10
8
12
11
8
5
10
12
10
Valve Panel Assy
Wafer Traverser
KLY-1608
28-4
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7TA3-00
VALVE PANEL ASSY.
1
2
KLY-M7T31-00
BRKT.,VALVE
2
3
KLY-M7T32-00
COVER,VALVE
2
4
KLY-M7TVA-00
VALVE,ASSY.
1
5
KGS-M5184-10
SEAL,EARTH 1
4
6
KLY-M7TB3-00
VALVE PANEL ASSY.
1
7
KLY-M7TVB-00
VALVE,ASSY.
1
8
91312-03006
BOLT,HEX.SOCKET HEAD
8
9
91312-03012
BOLT,HEX.SOCKET HEAD
4
10
97602-04306
SCREW,PAN HEAD W/W
6
11
91312-04010
BOLT,HEX.SOCKET HEAD
4
12
$CTAM1
ANCHOR MOUNT
6
4
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
25
29
23
24
4
3
2
24
23
8
24
19
17
27
12
21
14
25
18
27
24
30
25
23
5
13
25
20
26
11
15
28
22
16
10
25
6
25
29
23
24
Front Block
Wafer Shuttle ST
KLY-1608
29-1
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7SA1-00
SHUTTLE ST. A1 ASSY.
1
2
KLY-M7SB1-00
SHUTTLE ST. B1 ASSY.
1
3
KLY-M7SCL-00
SHUTTLE BLOCK ASSY.
1
4
KLY-M7SCR-00
SHUTTLE BLOCK ASSY.
1
parts same as 3
5
KLY-M7S70-00
BRKT.,TRANS.
2
6
KLY-M7S27-00
BRKT.,BELT 1
2
7
KLY-M7S29-00
BRKT.,BELT FIX
2
8
KLY-M7S38-00
BRKT.,CABLE FIX
2
9
KLY-M7S39-00
BRKT.,CABLE FIX
3
10
KLY-M7S51-00
COVER,SHUTTLE 1
2
11
KLY-M7S20-00
BLOCK,SHUTTLE
2
12
KLY-M7S21-00
ROD,NOZZLE
16
13
KLY-M7S23-00
SPRING
16
14
KLY-M7S25-00
ARM,DRIVE
2
15
KLY-M7S26-00
PLATE,SHUTTLE
2
16
KLY-M7S2C-00
POST,MARK
2
17
KLY-M7S2D-00
MECH STOPPER
2
18
KLF-M96HM-00
PIN,MARK
2
19
$TSH4-M3M
JOINT
16
20
90990-18J002
PIN,PARALLEL
4
21
90990-19J006
NEEDLE PIN
16
22
90112-2AJ005
BOLT, HEX.SOCKET HEAD
10
23
91312-03004
BOLT HEX,SOCKET HEAD
16
24
91312-03006
BOLT HEX,SOCKET HEAD
16
25
91312-03012
BOLT HEX,SOCKET HEAD
28
26
91312-03025
BOLT HEX,SOCKET HEAD
2
27
91312-04006
BOLT HEX,SOCKET HEAD
4
28
92A08-03003
SCREW,SET
2
29
KLY-M7SA2-00
SHUTTLE ST. A2 ASSY.
1
cf. next page
30
KLY-M7SB2-00
SHUTTLE ST. B2 ASSY.
1
cf. next page
2
3
23
18
23
13
24
16
15
23
8
7
21
4
12
24
24
17
23
23
14
23
23
19
1
23
24
11
25
6
20
22
9
24
26
10
2
3
23
18
23
13
24
16
15
23
8
7
21
4
12
24
24
17
23
23
14
23
23
19
1
23
24
11
25
6
20
22
9
24
26
10
Rear Block
Wafer Shuttle ST
KLY-1608
29-2
NO
Parts_No.
Parts_Name
Q_ty
Remarks
Compati
Revision_No._date
1
KLY-M7SA2-00
SHUTTLE ST. A2 ASSY.
1
2
KLY-M7SB2-00
SHUTTLE ST. B2 ASSY.
1
3
KLY-M7SCR-00
SHUTTLE BLOCK ASSY.
1
4
KLY-M7SCL-00
SHUTTLE BLOCK ASSY.
1
parts same as 3
5
KLY-M7S20-00
BLOCK,SHUTTLE
2
6
KLY-M7S21-00
ROD,NOZZLE
16
7
KLY-M7S23-00
SPRING
16
8
KLY-M7S25-00
ARM,DRIVE
2
9
KLY-M7S26-00
PLATE,SHUTTLE
2
10
KLY-M7S2C-00
POST,MARK
2
11
KLY-M7S2D-00
MECH STOPPER
2
12
KLF-M96HM-00
PIN,MARK
2
13
KLY-M7S28-00
BRKT.,BELT 2
2
14
KLY-M7S29-00
BRKT.,BELT FIX
2
15
KLY-M7S38-00
BRKT.,CABLE FIX
2
16
KLY-M7S39-00
BRKT.,CABLEFIX
2
17
KLY-M7S51-00
COVER,SHUTTLE 1
2
18
KLY-M7S54-00
COVER,SHUTTLE 2
2
19
$TSH4-M3M
JOINT
16
20
90990-18J002
PIN,PARALLEL
4
21
90990-19J006
NEEDLE PIN
16
22
90112-2AJ005
BOLT, HEX.SOCKET HEAD
10
23
91312-03006
BOLT HEX,SOCKET HEAD
36
24
91312-03012
BOLT HEX,SOCKET HEAD
28
25
91312-03025
BOLT HEX,SOCKET HEAD
2
26
92A08-03003
SCREW,SET
2