00195987-02_VB_SWS_Software_2.1_DE_EN.pdf - 第27页
SIPLACE S W S Software 2.1 / Ve rsions beschreibun g / Vers ion Description Ausgabe F ehler! Unb ekannter Nam e für Dokum ent - Eigens 27 12.7 Mapped Wa fer – Referencing and Itera tion Options 12.7.1 Limiting the ROI fo…
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12.6 Mapped Wafer - Reference Points
12.6.1 Teaching 4 Reference Points
The SWS software supports teaching of four reference points instead of three reference points, as
in previous versions.
12.6.2 Applying Reference Points from the Wafer Map
The SWS software supports the application of reference points from the wafer map.
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12.7 Mapped Wafer – Referencing and Iteration Options
12.7.1 Limiting the ROI for Wafer Referencing
If the reference point is not found at the theoretical position, a search will be triggered around the
theoretical position, during which the wafer table travels in a spiral pattern.
12.7.2 Forcing Referencing After Wafer Change
The Force referencing options ensures that the wafer is re-referenced at each wafer change. This
compensates any imprecision during wafer clamping.
12.7.3 Prohibiting Nonlinear Distortion
The Nonlinear distortion forbidden options checks the SWS software to see whether the pitch or
distortion between the individual reference points differs enough for there to be a different amount
of dies present in the rows and columns. If this option is enabled, referencing will be aborted in this
case.
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12.8 Plain Wafer
12.8.1 Using Fixed Wafer Map Coordinates
This option forces a link of the start die position and the wafer map coordinates.
Background:
Without this option (default), the wafer map die coordinates are calculated from the theoretical
center point once the start dies have been defined in manual or automatic wafer referencing. If the
wafer was fitted badly in the wafer frame and it is not possible to perform wafer edge recognition
(e.g. for synthetic wafers with very wide dicing streets) too many dies will be taken off the wafer or
large areas of the wafer will be approached in which no dies are found.
This is prevented with the Use fixed wafer map coordinates option.