00198596-02_JC_3M_C&P20P2M3_EN.pdf - 第13页

3 3-monthly C&P20 P2/M3 Clean the return unit 1 min 1 / 1 Refer to safety instructions in user manual before commencing Maintenance NOTICE! ESD guidelines are to be followed Tool: T21 Wear Part: Consumables: C3, C5, …

2 3-monthly C&P20 P2/M3 Remove the holding circuit / orifice plate 2 min 2 / 2

Refer to safety instructions in user manual before commencing Maintenance!

NOTICE! ESD guidelines are to be followed! Tool:

T21, T32, T44, T78

Wear Part:

W10, W32

Consumables:

www.asm-smt.com

7 Remove the three protruding screws from

the orifice plate.

8 Remove the orifice plate with the seal to

clean it and proceed with next task. See

appendix "Maintain the aperture ring".

3 3-monthly C&P20 P2/M3 Clean the return unit 1 min 1 / 1

Refer to safety instructions in user manual before commencing Maintenance

NOTICE! ESD guidelines are to be followed Tool:

T21

Wear Part: Consumables:

C3, C5, C22

www.asm-smt.com

1 Turn the head right side up and put the

headstand flat on the table.

2 Pull out the return cylinder. 3 Clean the upper contact area.

4 Clean the lower contact area. 5 Clean the shaft of the return unit.