DEK高级培训资料.pdf - 第221页
Real-time graphical display T OLERA NCE CONTROL LIMIT PLOTTING LIMIT P A R A METER NA ME (3) Theta Error (ar csec) 27.0000 Issue 2: July 2007 NOMINA L DA T A DET A ILS Cpk = 1.11 10.0474 143 10.0474 143 -27.0000 0.0000
Benchmark test using QC-Calc
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QC-Calc by Prolink Corporation
Issue 2: July 2007
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QC-Calc by Prolink Corporation
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Pre-installed on all machines
– Standard on Micron
– Option on instinctiv class with trial period after
installation
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Accessed via DUI or desktop
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Can be run in real time along with Dek software
Real-time graphical display
TOLERANCE
CONTROL LIMIT
PLOTTING LIMIT
PARAMETER NAME
(3) Theta Error (arcsec)
27.0000
Issue 2: July 2007
NOMINAL
DATA DETAILS
Cpk = 1.11
10.0474 14310.0474 143
-27.0000
0.0000
(3) Theta Error (arcsec)
27.0000
Real time Display-Compared to
bellcurve
Issue 2: July 2007
Cpk = 1.11
10.0474 14310.0474 143
-27.0000
0.0000
Tolerance
Range
Process
Width
Average (x)