4OM-1343-009_w.pdf - 第117页

1-60-1 AKFEMT -ID 4.6 Replacement Procedure of V acuum Filters T ime of Replacement Replacethelterswithnewoneseverythreemonths. V acu u m Filt ers V acu u m Filt ers Fig. 4A59 Filter Holder Required Item Filter …

1-60

AKFEMT-ID

(22) To check the results of the teaching operation, press the [Teach Result]

button.

The results are displayed, enabling you to check the offset data.

Fig. 4A58 "LINEAR MEASURE CLEANING" Window

([Teach Result] Button Selected)

(23) Press the [End] button.

Whentheteachingoperationisexecuted,aconrmationdialogbox

opens. Select either the [Yes] or the [No] button to determine whether

or not the data should be saved.

0604-003

4.5 Cleaning of Linear Measure Sensor

1-60-1

AKFEMT-ID

4.6 Replacement Procedure of Vacuum Filters

Time of Replacement

Replacethelterswithnewoneseverythreemonths.

Vacu um

Filters

Vacu um

Filters

Fig. 4A59 Filter Holder

Required Item

Filter Replacement Jig

Fig. 4A60 Filter Replacement Jig

Replacement Procedure

(1) Slidethelterfastenertotheleftandreleasethelockofthelter

holder.

Filter UnlockedFilter Locked

Fig. 4A61

Notice

Besuretoslidethelterfastenersothatitdoesnotinterferewiththe

wiring, etc.

0604-001

4.6 Replacement Procedure of Vacuum Filters

1-60-2

AKFEMT-ID

(2) Insertthelterreplacementjigintotheholeonthelterholderand

pull it up upward.

Hole on Filter Holder

Jig with pulled-out holder (filters)

Filter Replacement Jig

Fig. 4A62

(3) Replacethetwovacuumltersonthepulled-outholderwithnew

ones.

(4) Directthelargerholeon

thelterholderoutwardandinsertthe

holderwiththelterreplacementjig.

Be sure to push it deep enough until it stops (down to the lowest

limit).

Notice

The holder should not interfere with the wirings for valves, etc. In addition,

the wires should not be caught in the upper and lower areas of the top

block.

Filter Fastening Claw

<NG: Insufficient Insertion>

The upper surface of the

filter holder is higher than

that of the filter fastening

claw.

<OK: Sufficient Insertion>

The filter fastening claw is

higher than that of the filter

holder.

Fig. 4A63

0604-001

4.6 Replacement Procedure of Vacuum Filters