KE-2050_MS参数.pdf - 第3页
Rev.2.00 MS 参数 i 目 录 1. 概要 ........................................................................................................................... 1- 1 1-1． 定义 ........................................................…
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Rev.2.00
MS 参数
i
目 录
1. 概要 ...........................................................................................................................1-1
1-1． 定义 ..........................................................................................................................................
1-1
1-2． 起动和退出 ...............................................................................................................................1
-1
1-3． 构成 ..........................................................................................................................................
1-3
1-4． M
S参数的保存地方 ................................................................................................................... 1-4
1-5． 基本操作.................................................................................................................................
1-11
2. 控制菜单 ....................................................................................................................2-1
2-1. 起动方法...................................................................................................................................
2-1
2-2. 菜单内容...................................................................................................................................
2-1
2-3. XY轴移动..................................................................................................................................
2-2
2-4. Z任意坐标移动..........................................................................................................................
2-3
2-5. 传送控制...................................................................................................................................
2-4
2-6. 照明图 ......................................................................................................................................
2-4
2-7. 照明设定...................................................................................................................................
2-5
2-8. 无传送原点复位........................................................................................................................
2-5
3. 初期设定 ....................................................................................................................3-1
3-1. 机器规格...................................................................................................................................
3-1
3-2. 原点粗调整 ...............................................................................................................................3
-2
3-3. XY修正系数 .............................................................................................................................. 3-3
3-4. 附属装置(选项) .........................................................................................................................
3-4
3-5. 动作规格...................................................................................................................................
3-6
3-6. X轴弯曲校正 ...........................................................................................................................
3-12
3-7. 注释........................................................................................................................................ 3-13
4. 偏差设定 ....................................................................................................................4-1
4-1. 激光偏差...................................................................................................................................
4-1
4-1.1. 激光偏差............................................................................................................................
4-1
4-1.2. 激光缩放比例 ....................................................................................................................
4-7
4-2. OCC偏差...................................................................................................................................
4-8
4-2.1. OCC光量设定 ....................................................................................................................
4-8
4-2.2. OCC偏差 .........................................................................................................................
4-10
4-2.3. 辅助OCC偏差 ..................................................................................................................
4-13
4-3. CAL部偏差.............................................................................................................................. 4-17
4-4. 贴装头偏差 .............................................................................................................................
4-19
4-4.1. 贴装头偏差 ......................................................................................................................
4-19
4-4.2. BMR（坏板标记读取器、选购品）偏差................................................................................
4-22
4-4.3. 调整HMS（高度测定装置：选购品）偏差.............................................................................
4-24
Rev.2.00
MS 参数
ii
4-5. VCS偏差 ................................................................................................................................. 4-27
4-5.1. VCS光量粗调整...............................................................................................................
4-27
4-5.2. VCS光量微调整 ...............................................................................................................
4-37
4-5.3. VCS摄像机焦点偏差 ........................................................................................................
4-38
4-5.4. VCS摄像机缩放 ...............................................................................................................
4-42
4-5.5. VCS摄像机偏差 ...............................................................................................................
4-45
4-5.6. VCS通用参数 ...................................................................................................................
4-47
4-5.7. VCS共通参数 2 ................................................................................................................
4-49
4-5-8. VCS贴装综合偏差................................................................................................................
4-50
4-6. 共面偏差.................................................................................................................................
4-53
4-7. ATC偏差 .................................................................................................................................
4-56
4-8. CVS偏差 .................................................................................................................................
4-60
4-9. 传送偏差.................................................................................................................................
4-62
4-9.1. AWC偏差（选购）...............................................................................................................
4-62
4-9.2. 后备表偏差值...................................................................................................................
4-64
4-10. 吸附基准位置偏差..................................................................................................................
4-65
4-11. 贴装综合偏差.........................................................................................................................
4-67
4-12. SOT方向检查台偏差ト............................................................................................................
4-71
4-13. 贴装头待机位置 .....................................................................................................................
4-73
4-14. 真空 .......................................................................................................................................
4-74
4-14.1. 真空 .............................................................................................................................
4-74
4-14-2. 自我校准 ......................................................................................................................
4-78
5. 版本升级 .................................................................................................................... 5-1
5-1. 图像 ..........................................................................................................................................
5-1
5-2. I/O............................................................................................................................................ 5-2
5-3. B/
F ........................................................................................................................................... 5-3
5-4. MCM/MCMR.............................................................................................................................. 5-4
6. 程序的取消 ................................................................................................................ 6-1
6-1. I/O ............................................................................................................................................
6-1
6-2. B/
F ........................................................................................................................................... 6-2
6-3. JVS...........................................................................................................................................
6-3
7. 其它 ........................................................................................................................... 7-1
7-1. 激光测试仪标尺调整 .................................................................................................................
7-1
7-2. CAL部件台................................................................................................................................
7-2
7-3. BOC标记位置的编辑 .................................................................................................................
7-3
7-4 OCC更换组件偏差值 ..................................................................................................................
7-4
7-5 FCS ............................................................................................................................................
7-5