5OM-1732-003Y_F8_资料.pdf - 第54页
5OM-1732 2-B 1206-001
5OM-1732
2-A
第二章
传感器及负载配置图
本章节记载了各部的传感器及负载配置图。
因含有一定的难度，参考时请充分注意。
1206-001
5OM-1732
2-B1206-001
2-1-1
5OM-1732
Vacuum Pump
Front View
Manifold 1
Manifold 2
Vacuum/collective
disposal valve
Air Supply 2
Air Supply 1
Ｓ144
Ｍ66
Ｙ0938
Ｙ0939
Vacuum/collective
disposal valve
Ｙ0638
Ｙ0639
1206-001
传感器及负载配置图
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639
High-Speed/Multi-Functional Head Change-Over
Y0939
High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection
架台下布局