4OM-1610-002_w.pdf - 第106页
4OM-1610 1-55 4. Maintenance Method : Chap.1 (4) Fix the nozzle ange holding its lower surface upward by nger so that the nozzle is not inclined. Nozzle Press it upward. F4A39-7 (5) Push the sliding section to the main…

4OM-1610
1-54
4. Maintenance Method : Chap.1
•
For Middle - Size Odd Shaped Nozzle
Procedure
(1) Set the nozzle lter in the hole section.
Hole Section
Nozzle Filter
F4A39-4
(2) Insert the lter holding block into the opening section of the lter set.
Filter Holding Block
F4A39-5
(3) Orient the nozzle lter opening section to the lter insertion jig and insert the
nozzle into the guide section.
Note
Pay attention to the direction of the nozzle lter opening section.
Guide Section
F4A39-6
1011-001

4OM-1610
1-55
4. Maintenance Method : Chap.1
(4) Fix the nozzle ange holding its lower surface upward by nger so that the
nozzle is not inclined.
Nozzle
Press it
upward.
F4A39-7
(5) Push the sliding section to the main machine acrylic block end face and
insert the nozzle lter.
Acrylic Block End Face
Sliding Section
Push
F4A39-8
1011-001

4OM-1610
1-56
5. Consumables and Servicing Parts : Chap.1
1011-002
5. Consumables and Servicing Parts
5.1 List of Consumables
This component list is for the components that would be worn within one year.
When any of these components are to be purchased, contact Marketing Dept. of
HITACHI High-Technologies or our sales agent.
Product Name Part No. Part Name 16
Q'ty
Recommended
number per year
note (a)
Exploded
Illustration
Remarks
Nozzle (HV81C) HV81C--- ASSY, NOZZLE (HV81C) 30 30
Nozzle (HV03C) HV03C--- ASSY, NOZZLE (HV03C) 30 30
Nozzle (HB03C) HB03C--- ASSY, NOZZLE (HB03C) 30 30
Nozzle (HB04C) HB04C--- ASSY, NOZZLE (HB04C) 30 30
Nozzle (HA04C) HB04C--- ASSY, NOZZLE (HA04C) 30 30
Nozzle (HA05C) HA05C--- ASSY, NOZZLE (HA05C) 30 30
Nozzle (HA09C) HA09C--- ASSY, NOZZLE (HA09C) 30 30
Nozzle (PA05C) PA05C--- ASSY, NOZZLE (PA05C) 30 30
Nozzle (HG31C) HG31C--- ASSY, NOZZLE (HG31C) 30 30
Nozzle (HG51C) HG51C--- ASSY, NOZZLE (HG51C) 30 30
Nozzle (HG21C) HG21C--- ASSY, NOZZLE (HG21C) 30 30
Vacuum Filter 225B0572 AIR LINE EQPT 60 240 Fig. M-6,
Fig. SA-1
Fluorine Sheet 212A2743 GUIDE 2 2 Fig. DC-1,
Fig. DD-1
Urethane Clamp
ASSY
0920715E
09207152
Sliding Type Clamper ASSY
Fixed Type Clamper ASSY
1
1
1
1
Fig. DC-4,
Fig. DD-4
Flat Ring 0920H159
0920H158
SEAL
Hexagon Socket Head Cap
Screw 01605B0
1
6
1
6
Fig. DC-3,
Fig. DD-3
Cutter Unit
Sliding Side
For the Roller
Cutter Blade
Cutter Blade Set Bolt
0920H127
221A0231
DISK
Button Bottle
2
6
2
6
Fig. DC-3,
Fig. DD-3
Note (b)
Nozzle Filter 225A0045 Nozzle Filter 30
(15)
960
(480)
Note (c)
T4A15
Note
(a) The recommended number of pieces is the value for reference only.
(b) For the cutter blade replacement, consult with our service personnel
because it is a dangerous procedure.
(When the at ring is to be changed, also remove the set bolts (6 locations).
When it is to be changed, use the attached torque driver. The tightening
torque should be 20Ncm).
(c) The model names in brakets are for the machine using the multi-functional
head.
Reference
Refer to "3. Maintenance Spots" in "Chapter 1" for component replacement
procedures.