4OM-1610-002_w.pdf - 第107页
4OM-1610 1-56 5. Consumables and Servicing Parts : Chap.1 101 1-002 5. Consumables and Servicing Parts 5.1 List of Consumables This component list is for the components that would be worn within one year. When any of the…
4OM-1610
1-55
4. Maintenance Method : Chap.1
(4) Fix the nozzle ange holding its lower surface upward by nger so that the
nozzle is not inclined.
Nozzle
Press it
upward.
F4A39-7
(5) Push the sliding section to the main machine acrylic block end face and
insert the nozzle lter.
Acrylic Block End Face
Sliding Section
Push
F4A39-8
1011-001
4OM-1610
1-56
5. Consumables and Servicing Parts : Chap.1
1011-002
5. Consumables and Servicing Parts
5.1 List of Consumables
This component list is for the components that would be worn within one year.
When any of these components are to be purchased, contact Marketing Dept. of
HITACHI High-Technologies or our sales agent.
Product Name Part No. Part Name 16
Q'ty
Recommended
number per year
note (a)
Exploded
Illustration
Remarks
Nozzle (HV81C) HV81C--- ASSY, NOZZLE (HV81C) 30 30
Nozzle (HV03C) HV03C--- ASSY, NOZZLE (HV03C) 30 30
Nozzle (HB03C) HB03C--- ASSY, NOZZLE (HB03C) 30 30
Nozzle (HB04C) HB04C--- ASSY, NOZZLE (HB04C) 30 30
Nozzle (HA04C) HB04C--- ASSY, NOZZLE (HA04C) 30 30
Nozzle (HA05C) HA05C--- ASSY, NOZZLE (HA05C) 30 30
Nozzle (HA09C) HA09C--- ASSY, NOZZLE (HA09C) 30 30
Nozzle (PA05C) PA05C--- ASSY, NOZZLE (PA05C) 30 30
Nozzle (HG31C) HG31C--- ASSY, NOZZLE (HG31C) 30 30
Nozzle (HG51C) HG51C--- ASSY, NOZZLE (HG51C) 30 30
Nozzle (HG21C) HG21C--- ASSY, NOZZLE (HG21C) 30 30
Vacuum Filter 225B0572 AIR LINE EQPT 60 240 Fig. M-6,
Fig. SA-1
Fluorine Sheet 212A2743 GUIDE 2 2 Fig. DC-1,
Fig. DD-1
Urethane Clamp
ASSY
0920715E
09207152
Sliding Type Clamper ASSY
Fixed Type Clamper ASSY
1
1
1
1
Fig. DC-4,
Fig. DD-4
Flat Ring 0920H159
0920H158
SEAL
Hexagon Socket Head Cap
Screw 01605B0
1
6
1
6
Fig. DC-3,
Fig. DD-3
Cutter Unit
Sliding Side
For the Roller
Cutter Blade
Cutter Blade Set Bolt
0920H127
221A0231
DISK
Button Bottle
2
6
2
6
Fig. DC-3,
Fig. DD-3
Note (b)
Nozzle Filter 225A0045 Nozzle Filter 30
(15)
960
(480)
Note (c)
T4A15
Note
(a) The recommended number of pieces is the value for reference only.
(b) For the cutter blade replacement, consult with our service personnel
because it is a dangerous procedure.
(When the at ring is to be changed, also remove the set bolts (6 locations).
When it is to be changed, use the attached torque driver. The tightening
torque should be 20Ncm).
(c) The model names in brakets are for the machine using the multi-functional
head.
Reference
Refer to "3. Maintenance Spots" in "Chapter 1" for component replacement
procedures.
4OM-1610
1-57
5. Consumables and Servicing Parts : Chap.1
5.2 List of Servicing Parts
This component list is for the components for which maintenance is required in
several years, for your reference.
Note
For the maintenance procedure for the important maintenance components,
consult with our service personnel because high skill is required for such
maintenance.
Block
Name
Product Name Part No. Part Name Q'ty
Recommended
# of years
Note(a)
Exploded
Illustration
Remarks
Head
Section
Solenoid Valve 23D10016 ACCESSORY,SV 30 3 Fig. M-6
Nozzle Shaft ASSY
0916330J (*1)
0916331N (*2)
ASSY,GUIDE,LINEAR
30
Sets
- Fig. M-6 Note (c)
Hexagon Socket
Head Cap Screw
M2X4
221AA121 BOLT,HEX-SCT 30 - Fig. M-6 For Nozzle
Shaft Setup
Note (b)
O-Ring for Seal
Holder
226A0286
(S0-008-13)
0916D31E
(S0-010-12)
SEAL 30
90
2 Fig. M-6
Nozzle Shaft Spring 09160318 SPRING,COMP 30 2 Fig. M-6
Packing for Nozzle 226A0279 SEAL 60 - Fig. M-6
O-Ring for Filter
SO-008-11A
226A0276 SEAL 60 2 Fig. M-6
Line Sensor 23G00313 SENSOR,PELEC 2 2 Fig. M-6
Diffusion Plate
(Outside)
213D1169 (*1)
0916D31G (*2)
DISK 2 - Fig. M-6 Note (c)
Diffusion Plate
(Inside)
213D1336 (*1)
0916D31F (*2)
DISK 2 - Fig. M-6 Note (c)
Hexagon Socket
Head Cap Screw
M1.6X4
221AA332 BOLT,HEX-SCT 14 - Fig. M-6 For Diffusion
Plate Setup
Note (b)
Top Block 211G6373 BLOCK 30 - Fig. M-6
Cam Follower (f2.5) 222H0163 CAMFOLLOWER 30 - Fig. M-6
Hexagon Socket
Head Cap Screw
M1.6X3
221AA330 BOLT,HEX-SCT 60 - Fig. M-6 For Top
Block Setup
Note (b)
Sensor PM-U24 23G20046 SENSOR,PHOTO 2 3 Fig. M-4
Sensor PM-L24 23G10059 SENSOR,PHOTO 10 3 Fig. M-4
Slip Ring 0916D30T COUPLING 2 2 Fig. M-5
T4A16
1011-002