DECAN_F2_S2_TRM(Ver7.4_CS20.12).pdf - 第225页
Page +$1:+$ 221 DECAN F2/S2 Electric Power (8/8) NO. PA R T N O . P ART NA ME Q'TY Old No. Supply Supply L T Reference 1 A M03-010925 A 1 SM51 1_PW040 2 A M03-014851 A 1 SM48C-PW041 3 A M03-014906 A 1 SM48C_PW042-1 …
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220
DECAN
F2/S2
Electric Power (8/8)
3
5
U
V
W
PE
1
3
+24V
HD MAIN AIR
VACUUM AIR SOL CONNECTOR
VACUUM PUMP ALARM
GND
VACUUM PUMP ALARM
GND
+24V
VACUUM PUMP PWR
PE3
< OPTION >
-MC2
(TH-N12)
VACUUM
PUMP
SK
AM03-010925A
SM48C-PW041
SM48C_PW042-1
3P-C16
-CP3
CV-CN12
SM511_PW146-1
SM511_PW146
CV-CN15
AM03-014907A
AM03-010942D
SM511_PW040
SM48C_PW147-1
AM03-010940A
AM03-010941A
SM511_PW147
AM03-014851A
AM03-014906A
DECAN_PW042
AM03-015062A
1
3
5
2
4
6
2
4
6
97
95
98
96
13
A1
14
A2
135
246
1
2
3
4
1
2
3
4
5
6
7
8
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221
DECAN
F2/S2
Electric Power (8/8)
NO. PART NO. PART NAME Q'TY Old No. Supply Supply LT Reference
1 AM03-010925A 1 SM511_PW040
2 AM03-014851A 1 SM48C-PW041
3 AM03-014906A 1 SM48C_PW042-1
4 AM03-015062A 1 DECAN_PW042
5 AM03-014907A 1 SM48C_PW147-1
6 AM03-010940A 1 SM511_PW146
7 AM03-010942D 1 AM03-010942A SM511_PW147
8 AM03-010941A 1 SM511_PW146-1
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222
DECAN
F2/S2
Camera IO Board (1/6)