MN-E00372EDW-XX_B(1).pdf - 第104页
CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(EW83FC) DP X Y LINEAR TABLE
01-E17318
CS-01-E17318
21
FROM: 01-E17318_S_2015.03.16
S1
S
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 02-E03605 (EW83FC) X HOME SENSOR 1
2 02-E03606 (EW83FC) Y HOME SENSOR 1
3 02-E03607 (EW83FC) Z ROTATE SENSOR 1
4 02-E04757 EPOXY LEVEL SNR AMP 1
5 02-E11053 (EW) X ENCODER 0.5UM 1
6 02-E11054 (EW) Y ENCODER 0.5UM 1
7 02-E27450 (EW83FC) Z MOTOR ASSY 1
8 07-L00464-07 STY-LINEAR MOTOR ASSY 1
9 07-L00845 (EW83FC) X LINEAR MOTOR ASSY 1
10 20-00058 SOC HD CAP SCREW M3X10 ALLOY ST ZN PLT 24
11 20-00065 SOC HD CAP SCREW M4X10 ALLOY ST ZN PLT 16
12 20-00066 SOC HD CAP SCREW M4X12 ALLOY ST ZN PLT 8
13 20-00067 SOC HD CAP SCREW M4X14 ALLOY ST ZN PLT 6
14 23-40016 DOWEL PIN DIA 4X10LG 1
15 24-00053 BALL BEARING DIA 17 X DIA 26 X 5 1
16 24-00299 LM GUIDE HSR12 R2 UUC1M +270LSPM-II 1
17 24-00464 LM GUIDE SSR15XV2SSC1+160LYSPM-II 1
18 24-09007 A/C BALL BEARING 8X22X7 1
19 24-30156 LM GUIDE HSR10R2UUM+95LPM-II 1
20 26-E88264 (ABMUD) Y STOPPER 2
21 26-F69898 (EW83FC) Y STOPPER 1
22 26-F69903 (EW83FC) Z ECCENTRIC SHAFT 1
23 26-F69904 (EW83FC) AC BEARING SPACER 1
24 26-F69905 (EW83FC) LOCK NUT M8X0.75 2
25 26-F69973 (EW83FC) WEAR RESISTANCE CUBE 1
26 26-F69974 (EW83FC) DP BEARING COVER 1
27 26-F69979 (EW83FC) SPRING PIN_UPPER 2
28 26-F69980 (EW83FC) SPRING PIN_LOWER 2
29 26-G04344 (EW83FC) Y ENC BKT 1
30 53-00549 MAGNETIC SCALE 2MM PITCH 20UM ACCU 1
31 53-70023 RGS-S SCALE (SELF-ADHESIVE) 1
32 71-10080 BELLOW COUPLING DKN15/26-6.35H7-8H7 1
33 S26-48785 (EW) Z-SPRING 2
Assembly View
NOTE:For the exploded view,please refer to page 4-4.
4-3
(EWFC) MAIN EPOXY WRITER
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(EW83FC) DP X Y LINEAR TABLE
01-E17318
CS-01-E17318
22
FROM: 01-E17318_S_2015.03.16
S1
S
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
10
11
12
13
14
15
16
18
19
20
21
22
23
24
25
26
27
28
29
31
32
1
2
3
4
5
6
7
8
9
17
30
33
NOTE:For the part table,please refer to page 4-3.
02-E04757 is included of 01-E17315 in the assembly.
A
DETAIL A
B
DETAIL B
C
DETAIL C
D
DETAIL D
4-4
(EWFC) MAIN EPOXY WRITER
Section 5
Part NoDescriptionRevPage
01-E61490(OWBS) WAFER BOND SETUP OPTICS ASSYB5-1
01-E19348(OM)BARCODE READER ASSYA5-3
01-E35361(OBW) G2 BOND OPTICS TABLE ASSYA5-4
01-E57909(OB) FOV12.5 5M OPTICS W/ Z ADJT +6/-1.5C5-5
01-E61421(OB) 12.5MM 5M TV LENSA5-6
01-E58168(OW) WAFER OPTICS W/ SETUP OPTICS MOUNTC5-7
08-E0068812.5MM 5M TV LENSA5-8