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Section 11
Part NoDescriptionRevPage
01-E35501(WT) 8312SD WAFER TABLEC11-1
01-E10928(WT) WAFER TABLE X-BASEH11-3
01-E38490(WT) WAFER TABLE Y-BASEB11-4
01-E38491(WT) WAFER EXPANDERA11-5
01-E11105(WT) TOP PLATE UP/DN SCREW (DRIVING)B11-6
01-E11106(WT) TOP PLATE UP/DN SCREW (DRIVEN)D11-7
01-E11110(WT) ROTATING RING & PULLEY ASSYD11-8
01-E11112(WT) INNER RING ASSYC11-9
01-E11113(WT) EXPANDER TOP PLATE ASSYE11-10
01-E11116(WT) ROTATING RING ENCODER IDLERB11-11
01-E41542(WL) WAFER LOAD ASSY. (NONE CONTACT SNR)A11-12
01-E41543(WL) LOADER Y ARM ASSYB11-13
01-E41544(WL) LOADER CLAMP (NON CONTACT SNR)C11-14
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
SD WAFER TABLE
01-E35501
CS-01-E35501
21
FROM: 01-E35501_C_2013.04.09
C1
C
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E10928 (WT) WAFER TABLE X-BASE 1
2 01-E38490 (WT) WAFER TABLE Y-BASE 1
3 01-E38491 (WT) WAFER EXPANDER 1
4 01-E41542 (WL) WAFER LOAD ASSY. (NONE CONTACT SNR) 1
5 02-73975-03 ASIO 1
Assembly View
1
2
3
4
5
NOTE:02-73975-03 is included of S01-E45317 in the assembly.
Section 11(WT) 8312SD WAFER TABLE
11-1