MN-E00372EDW-XX_B(1).pdf - 第168页

CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…

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CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) INNER RING ASSY
01-E11112
CS-01-E11112
11
FROM: 01-E11112_C_2015.06.12
C1
C
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E11049 (WT) WE, GUIDE UNIT FOR CONNECTOR SHAFT 1
2 23-00037 DOWEL PIN D5 X L20 1
3 24-13014 LINEAR BUSHING LM4M 6
4 26-E38335 (WT) LM BUSH COVER 3
5 26-E38337 (WT) PRELOAD PLATE SHAFT 6
6 26-F51524 (WT) WE, INNER RING 1
7 875-20112 COMPRESSION SPRING D11260 6
Assembly View
2
3
4
5
6
1
7
11-9
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) EXPANDER TOP PLATE ASSY
01-E11113
CS-01-E11113
11
FROM: 01-E11113_E_2015.03.07
E1
E
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E08639 (WT) TOP RING V BEARING, FIX 2
2 01-E11008 (WT) TOP RING V BEARING, ADJ 2
3 01-E15047 (WT) 12INCH I/O GUIDE, RIGHT ASSY 1
4 01-E15048 (WT) 12INCH I/O GUIDE, LEFT ASSY 1
5 23-40043 DOWEL PIN D3 X L10, SST 8
6 26-F51605 (WT) WE-12, WAFER GUIDE, TOP RING, LEFT 1
7 26-F51606 (WT) WE-12, WAFER GUIDE, TOP RING, RIGHT 1
8 26-F51608 (WT) WE-12, END STOPPER 2
9 26-F51609 (WT) CONNECTOR SHAFT 1
Assembly View
6
7
9
2
5
3
4
A
DETAIL A
1
8
11-10
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) ROTATING RING ENCODER IDLER
01-E11116
CS-01-E11116
11
FROM: 01-E11116_B_2015.03.07
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 23-60014 PARALLEL KEY B2 X H2 X L10 2
2 24-00151 BALL BEARING 689 2
3 26-E26668 (WT) SET COLLAR D8.5 1
4 26-E38682 (WT) BEARING COVER, B17 1
5 26-E89100 LOCK NUT M8X0.75 T2 2
6 26-F51618 (WT) BEARING SPACER FOR IDLER SHAFT 1
7 26-F51619 (WT) ROTATING RING IDLER SHAFT 1
8 26-F51620 (WT) TIMING PULLEY (GT 3, 20T, W7) 1
9 26-F51621 (WT) TIMING PULLEY (HTD 3, 36T, W7) 1
1
2
3
4
5
6
7
8
9
Assembly View
11-11
(WT) 8312SD WAFER TABLE